tech
 scmos
end

version
 version 2001a-cifcheck
 description "SCMOS: Submit as technology.lambda.vendor: SCN6M_DEEP.09.TSMC [to process: TSMC18] has HV fets!: use ext2spice -jhnfet:0/Gnd -jhpfet:1/6/Vdd"
end

planes
  well,w
  implant,i
  select,s
  active,a
  metal1,m1
  metal2,m2
  metal3,m3
  metal4,m4
  metal5,m5
  metal6,m6
  metali,mi
  oxide,ox
  comment
  xp
  contact
  via1,v1
  via2,v2
  via3,v3
  via4,v4
  via5,v5
  viai,vi
  fill
end

types
  well  nwell,nw
  active  nwr
  well  pwell,pw
  well hvnwell,hnwell,hnw
  well hvpwell,hpwell,hpw
  implant  n_field_implant,nfi
  implant  p_field_implant,pfi
  select  nselect,ns
  select  pselect,ps
  active  ntransistor,nfet
  active  ptransistor,pfet
  active  diffusion,diff
  active  hdiffusion,hdiff
  active  transistor,fet
  active  htransistor,hfet
  active  ndiffusion,ndif,green
  active  pdiffusion,pdif,brown
  active  ndcontact,ndc
  active  pdcontact,pdc
  active  psubstratepdiff,pohmicdiff,pod,ppdiff,ppd,psd
  active  nsubstratendiff,nohmicdiff,nod,nndiff,nnd,nsd
  active  psubstratepcontact,pohmiccontact,poc,pwcontact,pwc,psc
  active  nsubstratencontact,nohmiccontact,noc,nwcontact,nwc,nsc
  active  nwsd
  active  hnwsd
  active  nwsc
  active  hnwsc
  active  pbase,pb
  active  emitter,emit,em
  active  emittercontact,emitcontact,emc,ec
  active  base
  active  basecontact,bcontact,bc
  active  collector,coll,col,co,cl
  active  collectorcontact,colcontact,colc,coc,clc
  active  hvntransistor,hvnfet,hnfet
  active  hvptransistor,hvpfet,hpfet
  active  hvndiffusion,hvndif,hndiff
  active  hvpdiffusion,hvpdif,hpdiff
  active  hvndcontact,hvndc,hndc
  active  hvpdcontact,hvpdc,hpdc
  active  hvpsubstratepdiff,hpohmicdiff,hpod,hppdiff,hppd,hpsd
  active  hvnsubstratendiff,hnohmicdiff,hnod,hnndiff,hnnd,hnsd
  active  hvpsubstratepcontact,hpohmiccontact,hpoc,hppcontact,hppc,hpwcontact,hpwc,hpsc
  active  hvnsubstratencontact,hnohmiccontact,hnoc,hnncontact,hnnc,hnwcontact,hnwc,hnsc
  active  hactiven_resist,hanres
  active  hactivep_resist,hapres
  active  polysilicon,red,poly,p
  active  polycontact,pcontact,polycut,pc
  active  polypplus,pp
  active  polynplus,pn
  active  polyppluscontact,ppcontact,ppc
  active  polynpluscontact,pncontact,pnc
  contact  genericcontact,gcontact,gc
  metal1  metal1,m1,blue
  metal1  pseudo_rmetal1,prm1
  metal1  rmetal1,rm1
  metal1  fillm1,fm1
  metal1  m2contact,m2cut,m2c,via1,v1
  metal1  pm12contact,pm12c
  metal1  ppm12contact,ppm12c
  metal1  pnm12contact,pnm12c
  metal1  pdm12contact,pdm12c
  metal1  psm12contact,psm12c,pom12c,pwm12c
  metal1  ndm12contact,ndm12c
  metal1  nsm12contact,nsm12c,nom12c,nwm12c
  metal1  nwsm12contact,nwsm12c
  metal1  hpdm12contact,hpdm12c
  metal1  hpsm12contact,hpsm12c,hpom12c,hpwm12c
  metal1  hndm12contact,hndm12c
  metal1  hnsm12contact,hnsm12c,hnom12c,hnwm12c
  metal2  metal2,m2,purple
  metal2  pseudo_rmetal2,prm2
  metal2  rmetal2,rm2
  metal2  fillm2,fm2
  via1  gv1
  metal2  m3contact,m3cut,m3c,via2,v2
  metal2  m123contact,m123c
  metal3  metal3,m3,cyan
  metal3  pseudo_rmetal3,prm3
  metal3  rmetal3,rm3
  metal3  fillm3,fm3
  via2    gv2
  metal3  m234contact,m234c
  metal3  m4contact,m4cut,m4c,via3,v3
  metal4  metal4,m4,yellow
  metal4  pseudo_rmetal4,prm4
  metal4  rmetal4,rm4
  metal4  fillm4,fm4
  via3    gv3
  metal4  m345contact,m345c
  metal4  m5contact,m5cut,m5c,via4,v4
  metal5  metal5,m5
  metal5  pseudo_rmetal5,prm5
  metal5  rmetal5,rm5
  metal5  fillm5,fm5
  via4    gv4
  metal5  m456contact,m456c
  metal5  m6contact,m6cut,m6c,via5,v5
  metal6  metal6,m6
  metal6  pseudo_rmetal6,prm6
  metal6  rmetal6,rm6
  metal6  fillm6,fm6
  via5    gv5
  metal6  pad
  metal6  micontact,micut,mic,viai,vi
  metali  metali,mim,mi
  mi  pseudo_rmetali,prmi
  mi rmi
  viai    gvi
  oxide  glass
  oxide  thickoxide,to
  active  silicide_block,sb
  active  poly_resist,pres
  active  pseudo_rpoly,prp
  active  rpoly,rp
  active  pseudo_rndiffusion,prnd
  active  rndiffusion,rndiff,rnd
  active  pseudo_rpdiffusion,prpd
  active  rpdiffusion,rpdiff,rpd
  active  pseudo_rnwell,prnwell,prnw
  active  rnwell,rnw
  active  pseudo_nwr,pnwr
  implant  filln,fn
  fill  filla,fa
  fill  fillb,fb
  active  fillp,fp
  active  fillapm,fapm
  active  activen_resist,anres
  active  activep_resist,apres
  xp  xp
  xp  m1p
  xp  m2p
  xp  m3p
  xp  m4p
  xp  m5p
  xp  m6p
  comment  comment
  comment  bb
end

contact
  pc  poly  metal1
  ppc  pp  metal1
  pnc  pn  metal1
  ndc  ndiff  metal1
  pdc  pdiff  metal1
  nsc  nsd  metal1
  nwsc  nwsd  metal1
  hnwsc  hnwsd  metal1
  psc  psd  metal1
  m2c  metal1  metal2
  m3c  metal2  metal3
  m4c  metal3  metal4
  m5c  metal4  metal5
  m6c  metal5  metal6
  mic  metal6  metali
  pm12c  poly  metal1  metal2
  ppm12c  pp  metal1  metal2
  pnm12c  pn  metal1  metal2
  pdm12c  pdiff  metal1  metal2
  psm12c  psd  metal1  metal2
  ndm12c  ndiff  metal1  metal2
  nsm12c  nsd  metal1  metal2
  nwsm12c  nwsd  metal1  metal2
  hpdm12c  hpdiff  metal1  metal2
  hpsm12c  hpsd  metal1  metal2
  hndm12c  hndiff  metal1  metal2
  hnsm12c  hnsd  metal1  metal2
  m123c  metal1  metal2  metal3
  m234c  metal2  metal3  metal4
  m345c  metal3  metal4  metal5
  m456c  metal4  metal5  metal6
  clc  collector  metal1
  emc  emit  metal1
  bc   base  metal1
  hndc  hndif  metal1
  hpdc  hpdif  metal1
  hnsc  hnsd  metal1
  hpsc  hpsd  metal1
