# 1 "scmos.tech.in" # 1 "" # 1 "" # 1 "scmos.tech.in" # 352 "scmos.tech.in" tech format 28 scmos end version version 8.2.8 # 370 "scmos.tech.in" description "MOSIS Scalable CMOS Technology for Standard Rules" end planes well,w implant,i active,a metal1,m1 metal2,m2 metal3,m3 oxide,ox end types well pwell,pw well nwell,nw well capwell,cwell,cw well highvoltnwell,hvnwell,hnwell,hnw well highvoltpwell,hvpwell,hpwell,hpw active polysilicon,red,poly,p active electrode,poly2,el,p2 active capacitor,polycap,pcap,cap active wellcapacitor,wellcap,wcap active ndiffusion,ndiff,green active pdiffusion,pdiff,brown active highvoltndiffusion,hvndiff,hndiff active highvoltpdiffusion,hvpdiff,hpdiff metal1 metal1,m1,blue metal2 metal2,m2,purple metal3 metal3,m3,cyan active ntransistor,nfet active ptransistor,pfet active entransistor,enfet active eptransistor,epfet active doublentransistor,nfloating-gate,nfloatg,nfg,nffet active doubleptransistor,pfloating-gate,pfloatg,pfg,pffet active highvoltntransistor,hvnfet,hnfet active highvoltptransistor,hvpfet,hpfet active collector,coll,col,co,cl active emitter,emit,em active pbase,pb implant bccdiffusion,bd active nbccdiffusion,nbd active polycontact,pcontact,polycut,pc active ndcontact,ndiffcut,ndc active pdcontact,pdiffcut,pdc active highvoltndcontact,hndiffcut,hndc active highvoltpdcontact,hpdiffcut,hpdc active capcontact,ccontact,capc,cc active electrodecontact,econtact,ec,poly2contact,p2c active collectorcontact,colcontact,colc,coc,clc active emittercontact,emitcontact,emc active pbasecontact,pbcontact,pbc active nbccdiffcontact,nbdc metal1 m2contact,m2cut,m2c,via,v metal2 m3contact,m3cut,m3c,via2,v2 active psubstratepcontact,ppcontact,ppc,pwcontact,pwc,psc active nsubstratencontact,nncontact,nnc,nwcontact,nwc,nsc active psubstratepdiff,ppdiff,pohmic,ppd,psd active nsubstratendiff,nndiff,nohmic,nnd,nsd active highvoltpsubcontact,hpwcontact,hpsc active highvoltnsubcontact,hnwcontact,hnsc active highvoltpsubdiff,hpohmic,hpsd active highvoltnsubdiff,hnohmic,hnsd active nplusdoping,ndoping,ndop active pplusdoping,pdoping,pdop metal1 genericcontact,gcontact,gc oxide substrateopen,subopen,open oxide pdiffusionstop,pdiffstop,pstop metal2 pad oxide glass end contact ec poly2 metal1 cc cap metal1 pc poly metal1 ndc ndiff metal1 pdc pdiff metal1 nsc nsd metal1 psc psd metal1 hndc hndiff metal1 hpdc hpdiff metal1 hnsc hnsd metal1 hpsc hpsd metal1 clc col metal1 emc emit metal1 pbc pbase metal1 nbdc nbd metal1 m2c metal1 metal2 m3c metal2 metal3 end styles styletype mos cwell 10 nwell 12 pwell 13 hnwell 18 hpwell 11 poly 1 poly2 14 ndiff 2 pdiff 4 psd 5 nsd 3 hndiff 2 hndiff 11 hpdiff 4 hpdiff 18 hpsd 5 hpsd 11 hnsd 3 hnsd 18 ndop 2 ndop 38 pdop 4 pdop 38 nfet 6 nfet 7 pfet 8 pfet 9 enfet 6 enfet 30 epfet 8 epfet 31 nffet 6 nffet 7 nffet 30 pffet 8 pffet 9 pffet 31 hnfet 6 hnfet 7 hnfet 30 hpfet 8 hpfet 9 hpfet 31 pbase 15 pbc 15 pbc 20 pbc 32 emit 16 emc 16 emc 20 emc 32 col 3 clc 3 clc 20 clc 32 cap 1 cap 14 wcap 6 wcap 10 cc 1 cc 14 cc 20 cc 32 metal1 20 metal2 21 metal3 22 gc 19 pcontact 26 pcontact 32 ec 14 ec 20 ec 32 ndc 2 ndc 20 ndc 32 pdc 4 pdc 20 pdc 32 psc 5 psc 20 psc 32 nsc 3 nsc 20 nsc 32 hndc 2 hndc 20 hndc 32 hndc 11 hpdc 4 hpdc 20 hpdc 32 hpdc 18 hpsc 5 hpsc 20 hpsc 32 hpsc 11 hnsc 3 hnsc 20 hnsc 32 hnsc 18 m2contact 20 m2contact 21 m2contact 33 m3contact 21 m3contact 22 m3contact 37 pad 20 pad 21 pad 33 pad 34 glass 34 bd 17 nbd 17 nbd 3 nbdc 3 nbdc 17 nbdc 20 nbdc 32 open 2 open 20 pstop 8 error_p 42 error_s 42 error_ps 42 end compose compose nfet poly hndiff compose pfet poly hpdiff compose nfet poly ndiff compose pfet poly pdiff compose hnfet poly2 hndiff compose hpfet poly2 hpdiff compose enfet poly2 ndiff compose epfet poly2 pdiff compose nffet nfet poly2 compose pffet pfet poly2 compose nffet enfet poly compose pffet epfet poly compose cap poly poly2 paint clc col clc paint emc emit emc paint emc pbase emc paint poly2 poly cap paint poly poly2 cap paint poly cap cap paint poly2 cap cap paint cap poly cap paint cap poly2 cap paint ec poly cc paint pdc pwell ndc paint pfet pwell nfet paint epfet pwell enfet paint pffet pwell nffet paint pdiff pwell ndiff paint nsd pwell psd paint nsc pwell psc paint ndc nwell pdc paint nfet nwell pfet paint enfet nwell epfet paint nffet nwell pffet paint ndiff nwell pdiff paint psd nwell nsd paint psc nwell nsc paint pdc hpwell hndc paint epfet hpwell hnfet paint pffet hpwell hnfet paint pdiff hpwell hndiff paint nsd hpwell hpsd paint nsc hpwell hpsc paint ndc hnwell hpdc paint enfet hnwell hpfet paint nffet hnwell hpfet paint ndiff hnwell hpdiff paint psd hnwell hnsd paint psc hnwell hnsc # 740 "scmos.tech.in" paint nfet cwell wcap paint poly wcap wcap paint ndiff wcap wcap paint wcap poly wcap paint wcap ndiff wcap erase wcap poly ndiff erase wcap ndiff poly erase wcap cwell nfet paint cwell nfet wcap active erase wcap nfet cwell well paint gc m1 gc paint pad m1 pad paint pad m2 pad paint pad m3 pad paint pad m2c pad paint hpdc hpwell hndc paint hpfet hpwell hnfet paint hpdiff hpwell hndiff paint hnsd hpwell hpsd paint hnsc hpwell hpsc paint hndc hnwell hpdc paint hnfet hnwell hpfet paint hndiff hnwell hpdiff paint hpsd hnwell hnsd paint hpsc hnwell hnsc paint hpdc pwell ndc paint hpfet pwell enfet paint hpdiff pwell ndiff paint hnsd pwell psd paint hnsc pwell psc paint hndc nwell pdc paint hnfet nwell epfet paint hndiff nwell pdiff paint hpsd nwell nsd paint hpsc nwell nsc end connect nwell,nsc,nsd nwell,nsc,nsd pwell,psc,psd pwell,psc,psd hnwell,hnsc,hnsd hnwell,hnsc,hnsd hpwell,hpsc,hpsd hpwell,hpsc,hpsd ndiff,ndc/a cwell pdc/m1,ndc/m1,psc/m1,nsc/m1,hpdc/m1,hndc/m1,hpsc/m1,hnsc/m1,pc/m1,ec/m1,capc/m1,clc/m1,emc/m1,pbc/m1,nbdc/m1,m1,m2c/m1,gc pdc/m1,ndc/m1,psc/m1,nsc/m1,hpdc/m1,hndc/m1,hpsc/m1,hnsc/m1,pc/m1,ec/m1,capc/m1,clc/m1,emc/m1,pbc/m1,nbdc/m1,m1,m2c/m1,gc m2,m2c/m2,m3c/m2,pad m2,m2c/m2,m3c/m2,pad m3,m3c/m3 m3,m3c/m3 poly,pc/a,nfet,pfet,wcap poly,pc/a,nfet,pfet,wcap poly2,ec/a,enfet,epfet,cap,capc/a,nffet,pffet,hnfet,hpfet poly2,ec/a,enfet,epfet,cap,capc/a,nffet,pffet,hnfet,hpfet ndiff,ndc/a,ndop psd,psc/a,pdop,pstop pdiff,pdc/a,pdop,pstop nsd,nsc/a,ndop hndiff,hndc/a,ndop hpsd,hpsc/a,pdop,pstop hpdiff,hpdc/a,pdop,pstop hnsd,hnsc/a,ndop ndiff ndc pdiff pdc hndiff hndc hpdiff hpdc nbd nbdc pbase pbc collector clc,nwell emitter emc gc ndiff,ndc/a,nfet,enfet,nffet,wcap,pdiff,pdc/a,pfet,epfet,pffet,nsd,nsc/a,psd,psc/a,nsd,nsc/a,psd,psc/a,hndiff,hndc/a,hpdiff,hpdc/a,metal1 gc poly,pc/a,nfet,pfet,wcap gc poly2,ec/a,enfet,epfet,cap,capc/a,nffet,pffet,hnfet,hpfet pad pdc/m1,ndc/m1,psc/m1,nsc/m1,hpdc/m1,hndc/m1,hpsc/m1,hnsc/m1,pc/m1,ec/m1,capc/m1,clc/m1,emc/m1,pbc/m1,nbdc/m1,m1,m2c/m1,gc pad m2,m2c/m2,m3c/m2,pad pad m3,m3c/m3 end # 845 "scmos.tech.in" cifoutput # 1 "cif_template/objs/CIFout" 1 style lambda=1.0(gen) scalefactor 100 50 layer CWC cwell calma 59 1 layer CWN nwell bloat-or pbase,pbc/act * 600 bloat-or pdiff,pdc/a,pfet,epfet,pffet * 500 bloat-or nsd,nsc/a * 300 bloat-or clc/a * 100 or col grow 300 shrink 300 calma 42 1 layer CWP pwell bloat-or ndiff,ndc/a,nfet,enfet,nffet * 500 bloat-or psd,psc/a * 300 and-not CWC shrink 300 grow 300 grow 300 shrink 300 calma 41 1 layer CMS m2,m2c/m2,m3c/m2,pad labels m2 calma 51 1 layer CMF pad grow 100 or pdc/m1,ndc/m1,psc/m1,nsc/m1,hpdc/m1,hndc/m1,hpsc/m1,hnsc/m1,pc/m1,ec/m1,capc/m1,clc/m1,emc/m1,pbc/m1,nbdc/m1,m1,m2c/m1,gc labels pdc,ndc,psc,nsc,hpdc,hndc,hpsc,hnsc,pc,ec,capc,nbdc,m1,m2c,gc calma 49 1 layer CPG cap,cc or poly,pc/a,nfet,pfet,wcap,cap,capc/a,nffet,pffet labels poly,nfet,pfet calma 46 1 layer CAA clc grow 100 or em,emc,col,pbase,pbc or ndiff,ndc/a,nfet,enfet,nffet,wcap,pdiff,pdc/a,pfet,epfet,pffet,nsd,nsc/a,psd,psc/a or hndiff,hndc/a,hpdiff,hpdc/a or bd,nbd,nbdc/a or open,pstop labels ndiff,pdiff calma 43 1 layer CX col,clc grow 100 calma 60 1 layer CVA pad shrink 500 or open calma 50 1 layer CVA m2c squares 100 200 300 calma 50 1 layer CEL poly2,ec/a,enfet,epfet,cap,capc/a,nffet,pffet,hnfet,hpfet calma 56 1 layer CCE capc,ec squares 200 calma 55 1 layer CCC gc calma 48 1 layer CCA ndc,pdc,clc,emc,pbc,nbdc squares 200 or open calma 48 1 layer CCA nsc,psc squares 200 calma 48 1 layer CCP pc squares 200 calma 47 1 layer CBA emc,emit grow 400 bloat-or pbc * 100 or pbase calma 58 1 templayer XTN clc grow 100 or em,emc,col grow 200 bloat-or ndiff,ndc/a,ndop * 200 psd,psc/a,pdiff,pdc/a,pdop 0 bloat-or nbd,nbdc,wcap * 200 grow 100 shrink 100 shrink 50 grow 50 templayer XTP pbc grow 100 bloat-or pdiff,pdc/a,pdop * 200 nsd,nsc/a,ndiff,ndc/a,ndop 0 grow 100 shrink 100 shrink 50 grow 50 layer CSN clc grow 100 or em,emc,col grow 200 bloat-or ndiff,ndc/a * 200 psd,psc/a 0 bloat-or nfet,enfet,nffet * 200 ndiff 300 psd,psc/a 0 bloat-or nsd,nsc/a * 200 pdiff,pdc/a 0 bloat-or nbd,nbdc,wcap * 200 bloat-or ndop * 200 psd,psc/a,pdiff,pdc/a,pdop 0 grow 100 shrink 100 shrink 50 grow 50 and-not XTP calma 45 1 layer CSP pbc grow 100 bloat-or pdiff,pdc/a * 200 nsd,nsc/a 0 bloat-or pfet,epfet,pffet * 200 pdiff 300 nsd,nsc/a 0 bloat-or psd,psc/a * 200 ndiff,ndc/a 0 bloat-or pdop * 200 nsd,nsc/a,ndiff,ndc/a,ndop 0 grow 100 shrink 100 shrink 50 grow 50 bloat-min pstop * 200 open 0 and-not XTN and-not CSN calma 44 1 layer CCD bd,nbd,nbdc/a grow 200 calma 57 1 layer COP open calma 23 1 layer CPS pstop calma 24 1 layer COG pad shrink 600 or glass or open labels pad calma 52 1 layer XP pad shrink 600 calma 26 1 render CWN 12 -0.2 0.2 render CAA 2 -0.15 0.15 render CPG 1 0.025 0.05 render CEL 14 0.1 0.05 render CCC 19 0.0 0.2 render CCA 19 0.0 0.2 render CCP 19 0.075 0.125 render CMF 20 0.2 0.05 render CVA 19 0.25 0.05 render CMS 21 0.3 0.05 style lambda=1.0(nwell) scalefactor 100 50 layer CWC cwell calma 59 1 layer CWN nwell bloat-or pbase,pbc/a * 600 bloat-or pdiff,pdc/a,pfet,epfet,pffet * 500 bloat-or nsd,nsc/a * 300 bloat-or clc/a * 100 or col grow 300 shrink 300 calma 42 1 layer CMS m2,m2c/m2,m3c/m2,pad labels m2 calma 51 1 layer CMF pad grow 100 or pdc/m1,ndc/m1,psc/m1,nsc/m1,hpdc/m1,hndc/m1,hpsc/m1,hnsc/m1,pc/m1,ec/m1,capc/m1,clc/m1,emc/m1,pbc/m1,nbdc/m1,m1,m2c/m1,gc labels pdc,ndc,psc,nsc,hpdc,hndc,hpsc,hnsc,pc,ec,capc,nbdc,m1,m2c,gc calma 49 1 layer CPG cap,cc or poly,pc/a,nfet,pfet,wcap,cap,capc/a,nffet,pffet labels poly,nfet,pfet calma 46 1 layer CAA clc grow 100 or em,emc,col,pbase,pbc or ndiff,ndc/a,nfet,enfet,nffet,wcap,pdiff,pdc/a,pfet,epfet,pffet,nsd,nsc/a,psd,psc/a or hndiff,hndc/a,hpdiff,hpdc/a or bd,nbd,nbdc/a or open,pstop labels ndiff,pdiff calma 43 1 layer CX col,clc grow 100 calma 60 1 layer CVA pad shrink 500 or open calma 50 1 layer CVA m2c squares 100 200 300 calma 50 1 layer CEL poly2,ec/a,enfet,epfet,cap,capc/a,nffet,pffet,hnfet,hpfet calma 56 1 layer CCE capc,ec squares 200 calma 55 1 layer CCC gc calma 63 1 layer CCA ndc,pdc,clc,emc,pbc,nbdc squares 200 or open calma 48 1 layer CCA nsc,psc squares 200 calma 48 1 layer CCP pc squares 200 calma 47 1 layer CBA emc,emit grow 400 bloat-or pbc * 100 or pbase calma 58 1 templayer XTN clc grow 100 or em,emc,col grow 200 bloat-or ndiff,ndc/a * 200 psd,psc/a 0 bloat-or nbd,nbdc,ndop,wcap * 200 templayer XTP pbc grow 100 bloat-or pdiff,pdc/a * 200 nsd,nsc/a 0 layer CSN clc grow 100 or emc,emit,col grow 200 bloat-or ndiff,ndc/a * 200 psd,psc/a 0 bloat-or nfet,enfet,nffet * 200 ndiff 300 psd,psc/a 0 bloat-or nsd,nsc/a * 200 pdiff,pdc/a 0 bloat-or nbd,nbdc,ndop,wcap * 200 grow 100 shrink 100 shrink 50 grow 50 and-not XTP calma 45 1 layer CSP pbc grow 100 bloat-or pdiff,pdc/a * 200 nsd,nsc/a 0 bloat-or pfet,epfet,pffet * 200 pdiff 300 nsd,nsc/a 0 bloat-or psd,psc/a * 200 ndiff,ndc/a 0 bloat-or pdop * 200 grow 100 shrink 100 shrink 50 grow 50 bloat-min pstop * 200 open 0 and-not XTN and-not CSN calma 44 1 layer CCD bd,nbd,nbdc/a grow 200 calma 57 1 layer COP open calma 23 1 layer CPS pstop calma 24 1 layer COG pad shrink 600 or glass or open labels pad calma 52 1 layer XP pad shrink 600 calma 26 1 style lambda=1.0(pwell) scalefactor 100 50 layer CWP pwell bloat-or ndiff,ndc/a,nfet,enfet,nffet * 500 bloat-or psd,psc/a * 300 grow 300 shrink 300 calma 41 1 layer CMS m2,m2c/m2,m3c/m2,pad labels m2 calma 51 1 layer CMF pad grow 100 or pdc/m1,ndc/m1,psc/m1,nsc/m1,hpdc/m1,hndc/m1,hpsc/m1,hnsc/m1,pc/m1,ec/m1,capc/m1,clc/m1,emc/m1,pbc/m1,nbdc/m1,m1,m2c/m1,gc labels pdc,ndc,psc,nsc,hpdc,hndc,hpsc,hnsc,pc,ec,capc,nbdc,m1,m2c,gc calma 49 1 layer CPG cap,cc or poly,pc/a,nfet,pfet,wcap,cap,capc/a,nffet,pffet labels poly,nfet,pfet calma 46 1 layer CAA clc grow 100 or em,emc,col or ndiff,ndc/a,nfet,enfet,nffet,wcap,pdiff,pdc/a,pfet,epfet,pffet,nsd,nsc/a,psd,psc/a or hndiff,hndc/a,hpdiff,hpdc/a or open,pstop labels ndiff,pdiff calma 43 1 layer CX col,clc grow 100 calma 60 1 layer CVA pad shrink 500 or open calma 50 1 layer CVA m2c squares 100 200 300 calma 50 1 layer CEL poly2,ec/a,enfet,epfet,cap,capc/a,nffet,pffet,hnfet,hpfet calma 56 1 layer CCE capc,ec squares 200 calma 55 1 layer CCC gc calma 63 1 layer CCA ndc,pdc,clc,emc,pbc squares 200 or open calma 48 1 layer CCA nsc,psc squares 200 calma 48 1 layer CCP pc squares 200 calma 47 1 layer CBA emc,emit grow 400 bloat-or pbc * 100 or pbase calma 58 1 templayer XTN bloat-or ndiff,ndc/a * 200 psd,psc/a 0 templayer XTP bloat-or pdiff,pdc/a * 200 nsd,nsc/a 0 layer CSP bloat-or pdiff,pdc/a * 200 nsd,nsc/a 0 bloat-or pfet,epfet,pffet * 200 pdiff 300 nsd,nsc/a 0 bloat-or psd,psc/a * 200 ndiff,ndc/a 0 bloat-or pdop * 200 grow 100 shrink 100 shrink 50 grow 50 bloat-min pstop * 200 open 0 and-not XTN calma 44 1 layer CSN bloat-or ndiff,ndc/a * 200 psd,psc/a 0 bloat-or nfet,enfet,nffet * 200 ndiff 300 psd,psc/a 0 bloat-or nsd,nsc/a * 200 pdiff,pdc/a 0 bloat-or ndop * 200 grow 100 shrink 100 shrink 50 grow 50 and-not XTP and-not CSP calma 45 1 layer COP open calma 23 1 layer CPS pstop calma 24 1 layer COG pad shrink 600 or glass or open labels pad calma 52 1 layer XP pad shrink 600 calma 26 1 style lambda=0.8(gen) scalefactor 80 40 layer CVN hnwell bloat-or hpdiff,hpdc/a,hpfet * 560 bloat-or hnsd,hnsc/a * 240 calma 40 1 layer CVP hpwell bloat-or hndiff,hndc/a,hnfet * 560 bloat-or hpsd,hpsc/a * 240 calma 39 1 layer CWN nwell bloat-or pbase,pbc/act * 480 bloat-or pdiff,pdc/a,pfet,epfet,pffet * 400 bloat-or nsd,nsc/a * 240 bloat-or clc/a * 80 or col grow 240 shrink 240 calma 42 1 layer CWP pwell bloat-or ndiff,ndc/a,nfet,enfet,nffet * 400 bloat-or psd,psc/a * 240 grow 240 shrink 240 calma 41 1 layer CMS m2,m2c/m2,m3c/m2,pad labels m2 calma 51 1 layer CMF pad grow 80 or pdc/m1,ndc/m1,psc/m1,nsc/m1,hpdc/m1,hndc/m1,hpsc/m1,hnsc/m1,pc/m1,ec/m1,capc/m1,clc/m1,emc/m1,pbc/m1,nbdc/m1,m1,m2c/m1,gc labels pdc,ndc,psc,nsc,hpdc,hndc,hpsc,hnsc,pc,ec,capc,nbdc,m1,m2c,gc calma 49 1 layer CPG cap,cc or poly,pc/a,nfet,pfet,wcap,cap,capc/a,nffet,pffet labels poly,nfet,pfet calma 46 1 layer CAA clc grow 80 or em,emc,col or ndiff,ndc/a,nfet,enfet,nffet,wcap,pdiff,pdc/a,pfet,epfet,pffet,nsd,nsc/a,psd,psc/a or hndiff,hndc/a,hpdiff,hpdc/a,hnsd,hnsc/a,hpsd,hpsc/a,hnfet,hpfet or open,pstop labels ndiff,pdiff calma 43 1 layer CX col,clc grow 80 calma 60 1 layer CVA pad shrink 560 or open calma 50 1 layer CVA m2c squares 80 160 240 calma 50 1 layer CEL poly2,ec/a,enfet,epfet,cap,capc/a,nffet,pffet,hnfet,hpfet calma 56 1 layer CCE capc,ec squares 160 calma 55 1 layer CCC gc calma 63 1 layer CCA ndc,pdc,clc,emc,pbc squares 160 or open calma 48 1 layer CCA nsc,psc squares 160 calma 48 1 layer CCA hndc,hpdc squares 160 160 160 calma 48 1 layer CCA hnsc,hpsc squares 160 160 160 calma 48 1 layer CCP pc squares 160 calma 47 1 layer CBA emc,emit grow 320 bloat-or pbc * 80 or pbase calma 58 1 templayer XTN clc grow 80 or em,emc,col grow 160 bloat-or ndiff,ndc/a * 160 psd,psc/a 0 bloat-or hndiff,hndc/a * 160 hpsd,hpsc/a 0 grow 80 shrink 80 shrink 40 grow 40 templayer XTP pbc grow 80 bloat-or pdiff,pdc/a * 160 nsd,nsc/a 0 bloat-or hpdiff,hpdc/a * 160 hnsd,hnsc/a 0 grow 80 shrink 80 shrink 40 grow 40 layer CSN clc grow 80 or em,emc,col grow 160 bloat-or ndiff,ndc/a * 160 psd,psc/a 0 bloat-or hndiff,hndc/a * 160 hpsd,hpsc/a 0 bloat-or nfet,enfet,nffet * 160 ndiff 240 psd,psc/a 0 bloat-or hnfet * 160 hndiff 240 hpsd,hpsc/a 0 bloat-or nsd,nsc/a * 160 pdiff,pdc/a 0 bloat-or hnsd,hnsc/a * 160 hpdiff,hpdc/a 0 bloat-or ndop * 160 psd,psc/a,pdiff,pdc/a,pdop 0 grow 80 shrink 80 shrink 40 grow 40 and-not XTP calma 45 1 layer CSP pbc grow 80 bloat-or pdiff,pdc/a * 160 nsd,nsc/a 0 bloat-or hpdiff,hpdc/a * 160 hnsd,hnsc/a 0 bloat-or pfet,epfet,pffet * 160 pdiff 240 nsd,nsc/a 0 bloat-or hpfet * 160 hpdiff 240 hnsd,hnsc/a 0 bloat-or psd,psc/a * 160 ndiff,ndc/a 0 bloat-or hpsd,hpsc/a * 160 hndiff,hndc/a 0 bloat-or pdop * 160 nsd,nsc/a,ndiff,ndc/a,ndop 0 grow 80 shrink 80 shrink 40 grow 40 bloat-min pstop * 160 open 0 and-not XTN and-not CSN calma 44 1 layer COP open calma 23 1 layer CPS pstop calma 24 1 layer COG pad shrink 640 or glass or open labels pad calma 52 1 layer XP pad shrink 640 calma 26 1 style lambda=0.6(gen) scalefactor 60 30 layer CWC cwell calma 59 1 layer CWN nwell bloat-or pbase,pbc/act * 360 bloat-or pdiff,pdc/a,pfet,epfet,pffet * 300 bloat-or nsd,nsc/a * 180 bloat-or clc/a * 60 or col grow 180 shrink 180 calma 42 1 layer CWP pwell bloat-or ndiff,ndc/a,nfet,enfet,nffet * 300 bloat-or psd,psc/a * 180 and-not CWC shrink 180 grow 180 grow 180 shrink 180 calma 41 1 layer CMS m2,m2c/m2,m3c/m2,pad labels m2 calma 51 1 layer CMF pad grow 60 or pdc/m1,ndc/m1,psc/m1,nsc/m1,hpdc/m1,hndc/m1,hpsc/m1,hnsc/m1,pc/m1,ec/m1,capc/m1,clc/m1,emc/m1,pbc/m1,nbdc/m1,m1,m2c/m1,gc labels pdc,ndc,psc,nsc,hpdc,hndc,hpsc,hnsc,pc,ec,capc,nbdc,m1,m2c,gc calma 49 1 layer CPG cap,cc or poly,pc/a,nfet,pfet,wcap,cap,capc/a,nffet,pffet labels poly,nfet,pfet calma 46 1 layer CAA clc grow 60 or em,emc,col,pbase,pbc or ndiff,ndc/a,nfet,enfet,nffet,wcap,pdiff,pdc/a,pfet,epfet,pffet,nsd,nsc/a,psd,psc/a or hndiff,hndc/a,hpdiff,hpdc/a or bd,nbd,nbdc/a or open,pstop labels ndiff,pdiff calma 43 1 layer CX col,clc grow 60 calma 60 1 layer CVA pad shrink 300 or open calma 50 1 layer CVA m2c squares 60 120 180 calma 50 1 layer CEL poly2,ec/a,enfet,epfet,cap,capc/a,nffet,pffet,hnfet,hpfet calma 56 1 layer CCE capc,ec squares 120 calma 55 1 layer CCC gc calma 48 1 layer CCA ndc,pdc,clc,emc,pbc,nbdc squares 120 or open calma 48 1 layer CCA nsc,psc squares 120 calma 48 1 layer CCP pc squares 120 calma 47 1 layer CBA emc,emit grow 240 bloat-or pbc * 60 or pbase calma 58 1 templayer XTN clc grow 60 or em,emc,col grow 120 bloat-or ndiff,ndc/a,ndop * 120 psd,psc/a,pdiff,pdc/a,pdop 0 bloat-or nbd,nbdc,wcap * 120 grow 60 shrink 60 shrink 30 grow 30 templayer XTP pbc grow 60 bloat-or pdiff,pdc/a,pdop * 120 nsd,nsc/a,ndiff,ndc/a,ndop 0 grow 60 shrink 60 shrink 30 grow 30 layer CSN clc grow 60 or em,emc,col grow 120 bloat-or ndiff,ndc/a * 120 psd,psc/a 0 bloat-or nfet,enfet,nffet * 120 ndiff 180 psd,psc/a 0 bloat-or nsd,nsc/a * 120 pdiff,pdc/a 0 bloat-or nbd,nbdc,wcap * 120 bloat-or ndop * 120 psd,psc/a,pdiff,pdc/a,pdop 0 grow 60 shrink 60 shrink 30 grow 30 and-not XTP calma 45 1 layer CSP pbc grow 60 bloat-or pdiff,pdc/a * 120 nsd,nsc/a 0 bloat-or pfet,epfet,pffet * 120 pdiff 180 nsd,nsc/a 0 bloat-or psd,psc/a * 120 ndiff,ndc/a 0 bloat-or pdop * 120 nsd,nsc/a,ndiff,ndc/a,ndop 0 grow 60 shrink 60 shrink 30 grow 30 bloat-min pstop * 120 open 0 and-not XTN and-not CSN calma 44 1 layer CCD bd,nbd,nbdc/a grow 120 calma 57 1 layer COP open calma 23 1 layer CPS pstop calma 24 1 layer COG pad shrink 600 or glass or open labels pad calma 52 1 layer XP pad shrink 600 calma 26 1 render CWN 12 -0.2 0.2 render CAA 2 -0.15 0.15 render CPG 1 0.025 0.05 render CEL 14 0.1 0.05 render CCC 19 0.0 0.2 render CCA 19 0.0 0.2 render CCP 19 0.075 0.125 render CMF 20 0.2 0.05 render CVA 19 0.25 0.05 render CMS 21 0.3 0.05 style lambda=0.6(nwell) scalefactor 60 30 layer CWC cwell calma 59 1 layer CWN nwell bloat-or pbase,pbc/a * 360 bloat-or pdiff,pdc/a,pfet,epfet,pffet * 300 bloat-or nsd,nsc/a * 180 bloat-or clc/a * 60 or col grow 180 shrink 180 calma 42 1 layer CMS m2,m2c/m2,m3c/m2,pad labels m2 calma 51 1 layer CMF pad grow 60 or pdc/m1,ndc/m1,psc/m1,nsc/m1,hpdc/m1,hndc/m1,hpsc/m1,hnsc/m1,pc/m1,ec/m1,capc/m1,clc/m1,emc/m1,pbc/m1,nbdc/m1,m1,m2c/m1,gc labels pdc,ndc,psc,nsc,hpdc,hndc,hpsc,hnsc,pc,ec,capc,nbdc,m1,m2c,gc calma 49 1 layer CPG cap,cc or poly,pc/a,nfet,pfet,wcap,cap,capc/a,nffet,pffet labels poly,nfet,pfet calma 46 1 layer CAA clc grow 60 or em,emc,col,pbase,pbc or ndiff,ndc/a,nfet,enfet,nffet,wcap,pdiff,pdc/a,pfet,epfet,pffet,nsd,nsc/a,psd,psc/a or hndiff,hndc/a,hpdiff,hpdc/a or bd,nbd,nbdc/a or open,pstop labels ndiff,pdiff calma 43 1 layer CX col,clc grow 60 calma 60 1 layer CVA pad shrink 300 or open calma 50 1 layer CVA m2c squares 60 120 180 calma 50 1 layer CEL poly2,ec/a,enfet,epfet,cap,capc/a,nffet,pffet,hnfet,hpfet calma 56 1 layer CCE capc,ec squares 120 calma 55 1 layer CCC gc calma 63 1 layer CCA ndc,pdc,clc,emc,pbc,nbdc squares 120 or open calma 48 1 layer CCA nsc,psc squares 120 calma 48 1 layer CCP pc squares 120 calma 47 1 layer CBA emc,emit grow 240 bloat-or pbc * 60 or pbase calma 58 1 templayer XTN clc grow 60 or em,emc,col grow 120 bloat-or ndiff,ndc/a * 120 psd,psc/a 0 bloat-or nbd,nbdc,ndop,wcap * 120 templayer XTP pbc grow 60 bloat-or pdiff,pdc/a * 120 nsd,nsc/a 0 layer CSN clc grow 60 or emc,emit,col grow 120 bloat-or ndiff,ndc/a * 120 psd,psc/a 0 bloat-or nfet,enfet,nffet * 120 ndiff 180 psd,psc/a 0 bloat-or nsd,nsc/a * 120 pdiff,pdc/a 0 bloat-or nbd,nbdc,ndop,wcap * 120 grow 60 shrink 60 shrink 30 grow 30 and-not XTP calma 45 1 layer CSP pbc grow 60 bloat-or pdiff,pdc/a * 120 nsd,nsc/a 0 bloat-or pfet,epfet,pffet * 120 pdiff 180 nsd,nsc/a 0 bloat-or psd,psc/a * 120 ndiff,ndc/a 0 bloat-or pdop * 120 grow 60 shrink 60 shrink 30 grow 30 bloat-min pstop * 120 open 0 and-not XTN and-not CSN calma 44 1 layer CCD bd,nbd,nbdc/a grow 120 calma 57 1 layer COP open calma 23 1 layer CPS pstop calma 24 1 layer COG pad shrink 600 or glass or open labels pad calma 52 1 layer XP pad shrink 600 calma 26 1 style lambda=0.6(pwell) scalefactor 60 30 layer CWP pwell bloat-or ndiff,ndc/a,nfet,enfet,nffet * 300 bloat-or psd,psc/a * 180 grow 180 shrink 180 calma 41 1 layer CMS m2,m2c/m2,m3c/m2,pad labels m2 calma 51 1 layer CMF pad grow 60 or pdc/m1,ndc/m1,psc/m1,nsc/m1,hpdc/m1,hndc/m1,hpsc/m1,hnsc/m1,pc/m1,ec/m1,capc/m1,clc/m1,emc/m1,pbc/m1,nbdc/m1,m1,m2c/m1,gc labels pdc,ndc,psc,nsc,hpdc,hndc,hpsc,hnsc,pc,ec,capc,nbdc,m1,m2c,gc calma 49 1 layer CPG cap,cc or poly,pc/a,nfet,pfet,wcap,cap,capc/a,nffet,pffet labels poly,nfet,pfet calma 46 1 layer CAA clc grow 60 or em,emc,col or ndiff,ndc/a,nfet,enfet,nffet,wcap,pdiff,pdc/a,pfet,epfet,pffet,nsd,nsc/a,psd,psc/a or hndiff,hndc/a,hpdiff,hpdc/a or open,pstop labels ndiff,pdiff calma 43 1 layer CX col,clc grow 60 calma 60 1 layer CVA pad shrink 300 or open calma 50 1 layer CVA m2c squares 60 120 180 calma 50 1 layer CEL poly2,ec/a,enfet,epfet,cap,capc/a,nffet,pffet,hnfet,hpfet calma 56 1 layer CCE capc,ec squares 120 calma 55 1 layer CCC gc calma 63 1 layer CCA ndc,pdc,clc,emc,pbc squares 120 or open calma 48 1 layer CCA nsc,psc squares 120 calma 48 1 layer CCP pc squares 120 calma 47 1 layer CBA emc,emit grow 240 bloat-or pbc * 60 or pbase calma 58 1 templayer XTN bloat-or ndiff,ndc/a * 120 psd,psc/a 0 templayer XTP bloat-or pdiff,pdc/a * 120 nsd,nsc/a 0 layer CSP bloat-or pdiff,pdc/a * 120 nsd,nsc/a 0 bloat-or pfet,epfet,pffet * 120 pdiff 180 nsd,nsc/a 0 bloat-or psd,psc/a * 120 ndiff,ndc/a 0 bloat-or pdop * 120 grow 60 shrink 60 shrink 30 grow 30 bloat-min pstop * 120 open 0 and-not XTN calma 44 1 layer CSN bloat-or ndiff,ndc/a * 120 psd,psc/a 0 bloat-or nfet,enfet,nffet * 120 ndiff 180 psd,psc/a 0 bloat-or nsd,nsc/a * 120 pdiff,pdc/a 0 bloat-or ndop * 120 grow 60 shrink 60 shrink 30 grow 30 and-not XTP and-not CSP calma 45 1 layer COP open calma 23 1 layer CPS pstop calma 24 1 layer COG pad shrink 600 or glass or open labels pad calma 52 1 layer XP pad shrink 600 calma 26 1 # 853 "scmos.tech.in" 2 # 867 "scmos.tech.in" style plot scalefactor 100 50 layer CM2 m2,m2c/m2,pad/m2 labels m2 layer CM1 pad grow 100 or m1,m2c/m1,pc/m1,ndc/m1,pdc/m1,ppcont/m1,nncont/m1 labels m1,m2c/m1,pc/m1,ndc/m1,pdc/m1,ppcont/m1,nncont/m1,pad/m1 layer CP poly,pc/active,nfet,pfet labels poly,nfet,pfet layer CND ndiff,ndc,nfet,pwc,psd labels ndiff layer CPD pdiff,pdc,pfet,nwc,nsd labels pdiff layer CNP bloat-or nsd,nwc * 150 ndiff,pdiff,ndc/active,pdc/active,ppcont/active,nncont/active,pfet,nfet,psd,nsd 0 layer CPP bloat-or psd,pwc * 150 ndiff,pdiff,ndc/active,pdc/active,ppcont/active,nncont/active,pfet,nfet,psd,nsd 0 layer CV m2c squares 100 200 300 layer CC ndc,pdc,pc,pwc,nwc squares 200 layer CNW nwell grow 400 shrink 400 layer CG pad shrink 600 or glass labels glass end # 910 "scmos.tech.in" cifinput # 1 "cif_template/objs/CIFin" 1 style lambda=1.0(gen) scalefactor 100 layer nwell CWN labels CWN layer pwell CWP labels CWP layer poly CPG labels CPG layer pdiff CSP and CAA and CWN layer ndiff CWP or CWC and CAA and CSN and-not CCD layer nsd CWN and CSN and CAA layer psd CWP and CSP and CAA layer pbase CBA labels CBA layer nfet CPG and CAA and CSN and-not CCD layer pfet CAA and CPG and CSP layer enfet CEL and CAA and CSN and-not CCD layer epfet CAA and CEL and CSP layer nffet CAA and CEL and CPG and CSN and CWP layer pffet CAA and CEL and CPG and CSP and CWN layer ndc CWP or CWC and CCA grow 100 and CAA and CSN and CMF layer pdc CCA grow 100 and CAA and CWN and CSP and CMF layer nsc CCA grow 100 and CAA and CSN and CWN and CMF layer psc CCA grow 100 and CAA and CSP and CWP and CMF layer gc CCC layer m2c CVA grow 100 and CMS and CMF labels CMS layer m3c CVS grow 100 and CMT and CMS and-not XP layer electrode CEL labels CEL layer ec CCE grow 100 and CMF and CEL labels CMF layer cc CCE grow 100 and CMF and CEL and CPG labels CMF layer cap CPG and CEL and-not CAA labels CEL layer pbc CCA grow 100 and CBA and CMF labels CBA layer col CX and CAA and CSN and CWN labels CAA layer clc CCA grow 100 and CX and CAA and CSN and CWN and CMF labels CCA layer emit CBA and CSN shrink 200 labels CBA layer emc CCA grow 100 and CBA and CSN and CMF labels CBA layer pc CCP grow 100 and CPG and CMF layer nbd CSN shrink 200 and CCD and CAA and-not CPG layer nbdc CCA grow 100 and CCD and CSN and CAA layer bd CPG or CEL and CCD and CAA labels CCD layer cwell CWC labels CWC layer glass COG layer open CAA and CCA and CVA and COG and COP layer pstop CAA and CPS and CSP and-not CWP and-not CWN layer pad CMF shrink 100 and CMS shrink 500 and CVA shrink 100 and XP and COG grow 600 layer m1 CMF labels CMF layer m2 CMS labels CMS layer m3 CMT and-not XP labels CMT calma COP 23 * calma CPS 24 * calma CCC 25 * calma XP 26 * calma CWP 41 * calma CWN 42 * calma CAA 43 * calma CSP 44 * calma CSN 45 * calma CPG 46 * calma CCP 47 * calma CCA 48 * calma CMF 49 * calma CVA 50 * calma CMS 51 * calma COG 52 * calma CCE 55 * calma CEL 56 * calma CCD 57 * calma CBA 58 * calma CWC 59 * calma CVS 61 * calma CMT 62 * calma CX 63 * style lambda=1.0(nwell) scalefactor 100 layer nwell CWN labels CWN layer m3 CMT and-not XP labels CMT layer m2 CMS labels CMS layer m1 CMF labels CMF layer poly CPG labels CPG layer psd CAA and CSP and-not CPS layer pdiff CWN and CAA and CSP labels CSP layer ndiff CAA and CSN and-not CCD labels CSN layer nsd CWN and CSN and CAA layer pbase CBA labels CBA layer nfet CPG and CAA and CSN and-not CCD layer pfet CAA and CPG and CSP and CWN layer enfet CEL and CAA and CSN and-not CCD layer epfet CAA and CEL and CSP and CWN layer nffet CAA and CEL and CPG and CSN layer pffet CAA and CEL and CPG and CSP and CWN layer m3c CVS grow 100 and CMT and CMS and-not XP layer m2c CVA grow 100 and CMS and CMF layer electrode CEL labels CEL layer ec CCE or CCC grow 100 and CMF and CEL layer cc CCE grow 100 and CMF and CEL and CPG labels CCE layer cap CPG and CEL and-not CAA layer psc CCA grow 100 and CAA and CSP and CMF layer ndc CCA or CCC grow 100 and CAA and CSN and CMF layer pdc CCA or CCC grow 100 and CAA and CWN and CSP and CMF layer nsc CCA or CCC grow 100 and CAA and CSN and CWN and CMF layer pbc CCA or CCC grow 100 and CBA and CMF layer emit CBA and CSN shrink 200 layer emc CCA grow 100 and CBA and CSN and CMF layer col CX and CAA and CSN and CWN layer clc CCA grow 100 and CX and CAA and CSN and CWN and CMF layer pc CCP or CCC grow 100 and CPG and CMF labels CCP layer nbd CSN shrink 200 and CCD and CAA and-not CPG layer nbdc CCA grow 100 and CCD and CSN and CAA layer bd CPG or CEL and CCD and CAA labels CCD layer cwell CWC labels CWC layer glass COG labels COG layer open CAA and CCA and CVA and COG and COP layer pstop CAA and CPS and CSP and-not CWN layer pad CMF shrink 100 and CMS shrink 500 and CVA shrink 100 and XP and COG grow 600 calma COP 23 * calma CPS 24 * calma XP 26 * calma CWN 42 * calma CAA 43 * calma CSP 44 * calma CSN 45 * calma CPG 46 * calma CCP 47 * calma CCA 48 * calma CMF 49 * calma CVA 50 * calma CMS 51 * calma COG 52 * calma CCE 55 * calma CEL 56 * calma CCD 57 * calma CBA 58 * calma CWC 59 * calma CVS 61 * calma CMT 62 * calma CX 63 * style lambda=1.0(oldnwell) scalefactor 100 layer cwell CWC layer nwell CWN labels CWN layer m3 CMT and-not XP labels CMT layer m2 CMS labels CMS layer m1 CMF labels CMF layer poly CPG labels CPG layer psd CAA layer pdiff CWN and CAA layer ndiff CAA and CSN and-not CCD layer nsd CWN and CSN and CAA layer pbase CBA labels CBA layer nfet CPG and CAA and CSN and-not CCD layer pfet CAA and CPG and CWN layer enfet CEL and CAA and CSN and-not CCD layer epfet CAA and CEL and CWN layer nffet CAA and CEL and CPG and CSN labels CEL layer pffet CAA and CEL and CPG and CWN labels CEL layer m2c CVA grow 150 shrink 50 and CMS and CMF layer electrode CEL labels CEL layer ec CCE grow 100 and CMF and CEL layer cc CCE grow 100 and CMF and CEL and CPG layer cap CPG and CEL and-not CAA labels CEL layer psc CCA grow 100 and CAA and CMF layer ndc CCA grow 100 and CAA and CSN and CMF layer pdc CCA grow 100 and CAA and CWN and CMF layer nsc CCA grow 100 and CAA and CSN and CWN and CMF layer m3c CVS grow 100 and CMT and CMS and-not XP layer gc CCC layer pbc CCA grow 100 and CBA and CMF layer col CX and CAA and CSN and CWN labels CAA layer clc CCA grow 100 and CX and CAA and CSN and CWN and CMF labels CCA layer emit CBA and CSN shrink 200 layer emc CCA grow 100 and CBA and CSN and CMF layer pc CCP grow 100 and CPG and CMF layer nbd CSN shrink 200 and CCD and CAA and-not CPG layer nbdc CCA grow 100 and CCD and CSN and CAA layer bd CPG or CEL and CCD and CAA labels CCD layer glass COG layer pad CMF shrink 100 and CMS shrink 500 and CVA shrink 100 and COG grow 600 and XP calma CWN 42 * calma CAA 43 * calma CSN 45 * calma CPG 46 * calma CCP 47 * calma CCA 48 * calma CMF 49 * calma CVA 50 * calma CMS 51 * calma COG 52 * calma CCE 55 * calma CEL 56 * calma CCD 57 * calma CBA 58 * calma CWC 59 * calma CX 60 * style lambda=1.0(pwell) scalefactor 100 layer pwell CWP labels CWP layer m3 CMT and-not XP labels CMT layer m2 CMS labels CMS layer m1 CMF labels CMF layer poly CPG labels CPG layer nsd CAA and CSN layer ndiff CWP and CSN and CAA layer pdiff CAA and CSP and-not CPS layer psd CWP and CSP and CAA layer pfet CPG and CAA and CSP layer nfet CAA and CPG and CSN and CWP layer epfet CEL and CAA and CSP layer enfet CAA and CEL and CSN and CWP layer m2c CVA grow 100 and CMS and CMF labels CMS layer electrode CEL labels CEL layer ec CCE grow 100 and CMF and CEL labels CMF layer cc CCE grow 100 and CMF and CEL and CPG labels CMF layer cap CPG and CEL and-not CAA labels CEL layer nsc CCA grow 100 and CAA and CSN and CMF layer pdc CCA grow 100 and CAA and CSP and CMF layer ndc CCA grow 100 and CSN and CAA and CWP and CMF layer psc CCA grow 100 and CAA and CSP and CWP and CMF layer pc CCP grow 100 and CPG and CMF layer m3c CVS grow 100 and CMT and CMS and-not XP layer glass COG layer open CAA and CCA and CVA and COG and COP layer pstop CAA and CPS and CSP and-not CWP layer pad CMF shrink 100 and CMS shrink 500 and CVA shrink 100 and XP and COG grow 600 calma COP 23 * calma CPS 24 * calma XP 26 * calma CWP 41 * calma CAA 43 * calma CSP 44 * calma CSN 45 * calma CPG 46 * calma CCP 47 * calma CCA 48 * calma CMF 49 * calma CVA 50 * calma CMS 51 * calma COG 52 * calma CCE 55 * calma CEL 56 * calma CVS 61 * calma CMT 62 * style lambda=1.0(nowell) scalefactor 100 layer poly CPG labels CPG layer pdiff CSP and CAA and CWN layer ndiff CWP or CWC and CAA and CSN and-not CCD layer nsd CWN and CSN and CAA layer psd CWP and CSP and CAA layer pbase CBA labels CBA layer nfet CPG and CAA and CSN and-not CCD layer pfet CAA and CPG and CSP layer enfet CEL and CAA and CSN and-not CCD layer epfet CAA and CEL and CSP layer nffet CAA and CEL and CPG and CSN and CWP layer pffet CAA and CEL and CPG and CSP and CWN layer ndc CWP or CWC and CCA grow 100 and CAA and CSN and CMF layer pdc CCA grow 100 and CAA and CWN and CSP and CMF layer nsc CCA grow 100 and CAA and CSN and CWN and CMF layer psc CCA grow 100 and CAA and CSP and CWP and CMF layer gc CCC layer m2c CVA grow 100 and CMS and CMF labels CMS layer m3c CVS grow 100 and CMT and CMS and-not XP layer electrode CEL labels CEL layer ec CCE grow 100 and CMF and CEL labels CMF layer cc CCE grow 100 and CMF and CEL and CPG labels CMF layer cap CPG and CEL and-not CAA labels CEL layer pbc CCA grow 100 and CBA and CMF labels CBA layer col CX and CAA and CSN and CWN labels CAA layer clc CCA grow 100 and CX and CAA and CSN and CWN and CMF labels CCA layer emit CBA and CSN shrink 200 labels CBA layer emc CCA grow 100 and CBA and CSN and CMF labels CBA layer pc CCP grow 100 and CPG and CMF layer nbd CSN shrink 200 and CCD and CAA and-not CPG layer nbdc CCA grow 100 and CCD and CSN and CAA layer bd CPG or CEL and CCD and CAA labels CCD layer cwell CWC labels CWC layer glass COG layer open CAA and CCA and CVA and COG and COP layer pstop CAA and CPS and CSP and-not CWP and-not CWN layer pad CMF shrink 100 and CMS shrink 500 and CVA shrink 100 and XP and COG grow 600 layer m1 CMF labels CMF layer m2 CMS labels CMS layer m3 CMT and-not XP labels CMT calma COP 23 * calma CPS 24 * calma CCC 25 * calma XP 26 * calma CWP 41 * calma CWN 42 * calma CAA 43 * calma CSP 44 * calma CSN 45 * calma CPG 46 * calma CCP 47 * calma CCA 48 * calma CMF 49 * calma CVA 50 * calma CMS 51 * calma COG 52 * calma CCE 55 * calma CEL 56 * calma CCD 57 * calma CBA 58 * calma CWC 59 * calma CVS 61 * calma CMT 62 * calma CX 63 * # 944 "cif_template/objs/CIFin" style lambda=0.8(gen) scalefactor 80 layer nwell CWN labels CWN layer pwell CWP labels CWP layer hnwell CVN labels CWN layer hpwell CVP labels CWP layer poly CPG labels CPG layer pdiff CSP and CAA and CWN layer ndiff CSN and CAA and CWP and-not CCD layer nsd CWN and CSN and CAA layer psd CWP and CSP and CAA layer hpdiff CSP and CAA and CVN layer hndiff CSN and CAA and CVP layer hnsd CVN and CSN and CAA layer hpsd CVP and CSP and CAA layer pbase CBA labels CBA layer nfet CPG and CAA and CSN and CWP and-not CCD layer pfet CAA and CPG and CSP and CWN layer hnfet CPG and CAA and CSN and CVP and-not CCD layer hpfet CAA and CPG and CSP and CVN layer enfet CEL and CAA and CSN and CWP and-not CCD layer epfet CAA and CEL and CSP and CWN layer nffet CEL and CAA and CSN and CPG and CWP and-not CCD layer pffet CAA and CPG and CEL and CSP and CWN layer ndc CCA grow 80 and CAA and CWP and CSN and CMF layer pdc CCA grow 80 and CAA and CWN and CSP and CMF layer nsc CCA grow 80 and CAA and CSN and CWN and CMF layer psc CCA grow 80 and CAA and CSP and CWP and CMF layer hndc CCA grow 160 and CAA and CVP and CSN and CMF layer hpdc CCA grow 160 and CAA and CVN and CSP and CMF layer hnsc CCA grow 160 and CAA and CSN and CVN and CMF layer hpsc CCA grow 160 and CAA and CSP and CVP and CMF layer gc CCC layer m2c CVA grow 80 and CMS and CMF labels CMS layer electrode CEL labels CEL layer ec CCE grow 80 and CMF and CEL labels CMF layer cc CCE grow 80 and CMF and CEL and CPG labels CMF layer cap CPG and CEL and-not CAA labels CEL layer pbc CCA grow 80 and CBA and CMF labels CBA layer col CBA grow 1600 and-not CBA and CX and CAA and CSN and CWN labels CAA layer clc CBA grow 1600 and-not CBA and CCA grow 80 and CX and CAA and CSN and CWN and CMF labels CCA layer emit CBA and CSN shrink 160 labels CBA layer emc CCA grow 80 and CBA and CSN and CMF labels CBA layer pc CCP grow 80 and CPG and CMF layer bd CAA and CCD and-not CSN grow 160 and CAA labels CCD layer nbd CSN shrink 160 and CCD and CAA labels CCD layer nbdc CCA grow 80 and CCD and CSN and CAA labels CCD layer glass COG layer open CAA and CCA and CVA and COG and COP layer pstop CAA and CPS and CSP and-not CWP and-not CWN layer pad CMF shrink 80 and CMS shrink 400 and CVA shrink 80 and COG grow 480 and XP layer m2 CMS labels CMS layer m1 CMF labels CMF calma CVP 21 * calma CVN 22 * calma COP 23 * calma CPS 24 * calma CCC 25 * calma XP 26 * calma CWP 41 * calma CWN 42 * calma CAA 43 * calma CSP 44 * calma CSN 45 * calma CPG 46 * calma CCP 47 * calma CCA 48 * calma CMF 49 * calma CVA 50 * calma CMS 51 * calma COG 52 * calma CCE 55 * calma CEL 56 * calma CCD 57 * calma CBA 58 * calma CX 63 * style lambda=0.8(nwell) scalefactor 80 layer nwell CWN labels CWN layer m3 CMT and-not XP labels CMT layer m2 CMS labels CMS layer m1 CMF labels CMF layer poly CPG labels CPG layer psd CAA and CSP and-not CPS layer pdiff CWN and CAA and CSP labels CSP layer ndiff CAA and CSN and-not CCD labels CSN layer nsd CWN and CSN and CAA layer pbase CBA labels CBA layer nfet CPG and CAA and CSN and-not CCD layer pfet CAA and CPG and CSP and CWN layer enfet CEL and CAA and CSN and-not CCD layer epfet CAA and CEL and CSP and CWN layer nffet CAA and CEL and CPG and CSN layer pffet CAA and CEL and CPG and CSP and CWN layer m3c CVS grow 80 and CMT and CMS and-not XP layer m2c CVA grow 80 and CMS and CMF layer electrode CEL labels CEL layer ec CCE or CCC grow 80 and CMF and CEL layer cc CCE grow 80 and CMF and CEL and CPG labels CCE layer cap CPG and CEL and-not CAA layer psc CCA grow 80 and CAA and CSP and CMF layer ndc CCA or CCC grow 80 and CAA and CSN and CMF layer pdc CCA or CCC grow 80 and CAA and CWN and CSP and CMF layer nsc CCA or CCC grow 80 and CAA and CSN and CWN and CMF layer pbc CCA or CCC grow 80 and CBA and CMF layer emit CBA and CSN shrink 160 layer emc CCA grow 80 and CBA and CSN and CMF layer col CX and CAA and CSN and CWN layer clc CCA grow 80 and CX and CAA and CSN and CWN and CMF layer pc CCP or CCC grow 80 and CPG and CMF labels CCP layer nbd CSN shrink 160 and CCD and CAA and-not CPG layer nbdc CCA grow 80 and CCD and CSN and CAA layer bd CPG or CEL and CCD and CAA labels CCD layer cwell CWC labels CWC layer glass COG labels COG layer open CAA and CCA and CVA and COG and COP layer pstop CAA and CPS and CSP and-not CWN layer pad CMF shrink 80 and CMS shrink 400 and CVA shrink 80 and XP and COG grow 480 calma COP 23 * calma CPS 24 * calma XP 26 * calma CWN 42 * calma CAA 43 * calma CSP 44 * calma CSN 45 * calma CPG 46 * calma CCP 47 * calma CCA 48 * calma CMF 49 * calma CVA 50 * calma CMS 51 * calma COG 52 * calma CCE 55 * calma CEL 56 * calma CCD 57 * calma CBA 58 * calma CWC 59 * calma CVS 61 * calma CMT 62 * calma CX 63 * style lambda=0.8(oldnwell) scalefactor 80 layer cwell CWC layer nwell CWN labels CWN layer m3 CMT and-not XP labels CMT layer m2 CMS labels CMS layer m1 CMF labels CMF layer poly CPG labels CPG layer psd CAA layer pdiff CWN and CAA layer ndiff CAA and CSN and-not CCD layer nsd CWN and CSN and CAA layer pbase CBA labels CBA layer nfet CPG and CAA and CSN and-not CCD layer pfet CAA and CPG and CWN layer enfet CEL and CAA and CSN and-not CCD layer epfet CAA and CEL and CWN layer nffet CAA and CEL and CPG and CSN labels CEL layer pffet CAA and CEL and CPG and CWN labels CEL layer m2c CVA grow 150 shrink 50 and CMS and CMF layer electrode CEL labels CEL layer ec CCE grow 80 and CMF and CEL layer cc CCE grow 80 and CMF and CEL and CPG layer cap CPG and CEL and-not CAA labels CEL layer psc CCA grow 80 and CAA and CMF layer ndc CCA grow 80 and CAA and CSN and CMF layer pdc CCA grow 80 and CAA and CWN and CMF layer nsc CCA grow 80 and CAA and CSN and CWN and CMF layer m3c CVS grow 80 and CMT and CMS and-not XP layer gc CCC layer pbc CCA grow 80 and CBA and CMF layer col CX and CAA and CSN and CWN labels CAA layer clc CCA grow 80 and CX and CAA and CSN and CWN and CMF labels CCA layer emit CBA and CSN shrink 160 layer emc CCA grow 80 and CBA and CSN and CMF layer pc CCP grow 80 and CPG and CMF layer nbd CSN shrink 160 and CCD and CAA and-not CPG layer nbdc CCA grow 80 and CCD and CSN and CAA layer bd CPG or CEL and CCD and CAA labels CCD layer glass COG layer pad CMF shrink 80 and CMS shrink 400 and CVA shrink 80 and COG grow 480 and XP calma CWN 42 * calma CAA 43 * calma CSN 45 * calma CPG 46 * calma CCP 47 * calma CCA 48 * calma CMF 49 * calma CVA 50 * calma CMS 51 * calma COG 52 * calma CCE 55 * calma CEL 56 * calma CCD 57 * calma CBA 58 * calma CWC 59 * calma CX 60 * style lambda=0.8(pwell) scalefactor 80 layer pwell CWP labels CWP layer m3 CMT and-not XP labels CMT layer m2 CMS labels CMS layer m1 CMF labels CMF layer poly CPG labels CPG layer nsd CAA and CSN layer ndiff CWP and CSN and CAA layer pdiff CAA and CSP and-not CPS layer psd CWP and CSP and CAA layer pfet CPG and CAA and CSP layer nfet CAA and CPG and CSN and CWP layer epfet CEL and CAA and CSP layer enfet CAA and CEL and CSN and CWP layer m2c CVA grow 80 and CMS and CMF labels CMS layer electrode CEL labels CEL layer ec CCE grow 80 and CMF and CEL labels CMF layer cc CCE grow 80 and CMF and CEL and CPG labels CMF layer cap CPG and CEL and-not CAA labels CEL layer nsc CCA grow 80 and CAA and CSN and CMF layer pdc CCA grow 80 and CAA and CSP and CMF layer ndc CCA grow 80 and CSN and CAA and CWP and CMF layer psc CCA grow 80 and CAA and CSP and CWP and CMF layer pc CCP grow 80 and CPG and CMF layer m3c CVS grow 80 and CMT and CMS and-not XP layer glass COG layer open CAA and CCA and CVA and COG and COP layer pstop CAA and CPS and CSP and-not CWP layer pad CMF shrink 80 and CMS shrink 400 and CVA shrink 80 and XP and COG grow 480 calma COP 23 * calma CPS 24 * calma XP 26 * calma CWP 41 * calma CAA 43 * calma CSP 44 * calma CSN 45 * calma CPG 46 * calma CCP 47 * calma CCA 48 * calma CMF 49 * calma CVA 50 * calma CMS 51 * calma COG 52 * calma CCE 55 * calma CEL 56 * calma CVS 61 * calma CMT 62 * style lambda=0.8(nowell) scalefactor 80 layer poly CPG labels CPG layer pdiff CSP and CAA and CWN layer ndiff CWP or CWC and CAA and CSN and-not CCD layer nsd CWN and CSN and CAA layer psd CWP and CSP and CAA layer pbase CBA labels CBA layer nfet CPG and CAA and CSN and-not CCD layer pfet CAA and CPG and CSP layer enfet CEL and CAA and CSN and-not CCD layer epfet CAA and CEL and CSP layer nffet CAA and CEL and CPG and CSN and CWP layer pffet CAA and CEL and CPG and CSP and CWN layer ndc CWP or CWC and CCA grow 80 and CAA and CSN and CMF layer pdc CCA grow 80 and CAA and CWN and CSP and CMF layer nsc CCA grow 80 and CAA and CSN and CWN and CMF layer psc CCA grow 80 and CAA and CSP and CWP and CMF layer gc CCC layer m2c CVA grow 80 and CMS and CMF labels CMS layer m3c CVS grow 80 and CMT and CMS and-not XP layer electrode CEL labels CEL layer ec CCE grow 80 and CMF and CEL labels CMF layer cc CCE grow 80 and CMF and CEL and CPG labels CMF layer cap CPG and CEL and-not CAA labels CEL layer pbc CCA grow 80 and CBA and CMF labels CBA layer col CX and CAA and CSN and CWN labels CAA layer clc CCA grow 80 and CX and CAA and CSN and CWN and CMF labels CCA layer emit CBA and CSN shrink 160 labels CBA layer emc CCA grow 80 and CBA and CSN and CMF labels CBA layer pc CCP grow 80 and CPG and CMF layer nbd CSN shrink 160 and CCD and CAA and-not CPG layer nbdc CCA grow 80 and CCD and CSN and CAA layer bd CPG or CEL and CCD and CAA labels CCD layer cwell CWC labels CWC layer glass COG layer open CAA and CCA and CVA and COG and COP layer pstop CAA and CPS and CSP and-not CWP and-not CWN layer pad CMF shrink 80 and CMS shrink 400 and CVA shrink 80 and XP and COG grow 480 layer m1 CMF labels CMF layer m2 CMS labels CMS layer m3 CMT and-not XP labels CMT calma COP 23 * calma CPS 24 * calma CCC 25 * calma XP 26 * calma CWP 41 * calma CWN 42 * calma CAA 43 * calma CSP 44 * calma CSN 45 * calma CPG 46 * calma CCP 47 * calma CCA 48 * calma CMF 49 * calma CVA 50 * calma CMS 51 * calma COG 52 * calma CCE 55 * calma CEL 56 * calma CCD 57 * calma CBA 58 * calma CWC 59 * calma CVS 61 * calma CMT 62 * calma CX 63 * style lambda=0.6(gen) scalefactor 60 layer nwell CWN labels CWN layer pwell CWP labels CWP layer poly CPG labels CPG layer pdiff CSP and CAA and CWN layer ndiff CWP or CWC and CAA and CSN and-not CCD layer nsd CWN and CSN and CAA layer psd CWP and CSP and CAA layer pbase CBA labels CBA layer nfet CPG and CAA and CSN and-not CCD layer pfet CAA and CPG and CSP layer enfet CEL and CAA and CSN and-not CCD layer epfet CAA and CEL and CSP layer nffet CAA and CEL and CPG and CSN and CWP layer pffet CAA and CEL and CPG and CSP and CWN layer ndc CWP or CWC and CCA grow 60 and CAA and CSN and CMF layer pdc CCA grow 60 and CAA and CWN and CSP and CMF layer nsc CCA grow 60 and CAA and CSN and CWN and CMF layer psc CCA grow 60 and CAA and CSP and CWP and CMF layer gc CCC layer m2c CVA grow 60 and CMS and CMF labels CMS layer m3c CVS grow 60 and CMT and CMS and-not XP layer electrode CEL labels CEL layer ec CCE grow 60 and CMF and CEL labels CMF layer cc CCE grow 60 and CMF and CEL and CPG labels CMF layer cap CPG and CEL and-not CAA labels CEL layer pbc CCA grow 60 and CBA and CMF labels CBA layer col CX and CAA and CSN and CWN labels CAA layer clc CCA grow 60 and CX and CAA and CSN and CWN and CMF labels CCA layer emit CBA and CSN shrink 120 labels CBA layer emc CCA grow 60 and CBA and CSN and CMF labels CBA layer pc CCP grow 60 and CPG and CMF layer nbd CSN shrink 120 and CCD and CAA and-not CPG layer nbdc CCA grow 60 and CCD and CSN and CAA layer bd CPG or CEL and CCD and CAA labels CCD layer cwell CWC labels CWC layer glass COG layer open CAA and CCA and CVA and COG and COP layer pstop CAA and CPS and CSP and-not CWP and-not CWN layer pad CMF shrink 60 and CMS shrink 300 and CVA shrink 60 and XP and COG grow 360 layer m1 CMF labels CMF layer m2 CMS labels CMS layer m3 CMT and-not XP labels CMT calma COP 23 * calma CPS 24 * calma CCC 25 * calma XP 26 * calma CWP 41 * calma CWN 42 * calma CAA 43 * calma CSP 44 * calma CSN 45 * calma CPG 46 * calma CCP 47 * calma CCA 48 * calma CMF 49 * calma CVA 50 * calma CMS 51 * calma COG 52 * calma CCE 55 * calma CEL 56 * calma CCD 57 * calma CBA 58 * calma CWC 59 * calma CVS 61 * calma CMT 62 * calma CX 63 * style lambda=0.6(nwell) scalefactor 60 layer nwell CWN labels CWN layer m3 CMT and-not XP labels CMT layer m2 CMS labels CMS layer m1 CMF labels CMF layer poly CPG labels CPG layer psd CAA and CSP and-not CPS layer pdiff CWN and CAA and CSP labels CSP layer ndiff CAA and CSN and-not CCD labels CSN layer nsd CWN and CSN and CAA layer pbase CBA labels CBA layer nfet CPG and CAA and CSN and-not CCD layer pfet CAA and CPG and CSP and CWN layer enfet CEL and CAA and CSN and-not CCD layer epfet CAA and CEL and CSP and CWN layer nffet CAA and CEL and CPG and CSN layer pffet CAA and CEL and CPG and CSP and CWN layer m3c CVS grow 60 and CMT and CMS and-not XP layer m2c CVA grow 60 and CMS and CMF layer electrode CEL labels CEL layer ec CCE or CCC grow 60 and CMF and CEL layer cc CCE grow 60 and CMF and CEL and CPG labels CCE layer cap CPG and CEL and-not CAA layer psc CCA grow 60 and CAA and CSP and CMF layer ndc CCA or CCC grow 60 and CAA and CSN and CMF layer pdc CCA or CCC grow 60 and CAA and CWN and CSP and CMF layer nsc CCA or CCC grow 60 and CAA and CSN and CWN and CMF layer pbc CCA or CCC grow 60 and CBA and CMF layer emit CBA and CSN shrink 120 layer emc CCA grow 60 and CBA and CSN and CMF layer col CX and CAA and CSN and CWN layer clc CCA grow 60 and CX and CAA and CSN and CWN and CMF layer pc CCP or CCC grow 60 and CPG and CMF labels CCP layer nbd CSN shrink 120 and CCD and CAA and-not CPG layer nbdc CCA grow 60 and CCD and CSN and CAA layer bd CPG or CEL and CCD and CAA labels CCD layer cwell CWC labels CWC layer glass COG labels COG layer open CAA and CCA and CVA and COG and COP layer pstop CAA and CPS and CSP and-not CWN layer pad CMF shrink 60 and CMS shrink 300 and CVA shrink 60 and XP and COG grow 360 calma COP 23 * calma CPS 24 * calma XP 26 * calma CWN 42 * calma CAA 43 * calma CSP 44 * calma CSN 45 * calma CPG 46 * calma CCP 47 * calma CCA 48 * calma CMF 49 * calma CVA 50 * calma CMS 51 * calma COG 52 * calma CCE 55 * calma CEL 56 * calma CCD 57 * calma CBA 58 * calma CWC 59 * calma CVS 61 * calma CMT 62 * calma CX 63 * style lambda=0.6(oldnwell) scalefactor 60 layer cwell CWC layer nwell CWN labels CWN layer m3 CMT and-not XP labels CMT layer m2 CMS labels CMS layer m1 CMF labels CMF layer poly CPG labels CPG layer psd CAA layer pdiff CWN and CAA layer ndiff CAA and CSN and-not CCD layer nsd CWN and CSN and CAA layer pbase CBA labels CBA layer nfet CPG and CAA and CSN and-not CCD layer pfet CAA and CPG and CWN layer enfet CEL and CAA and CSN and-not CCD layer epfet CAA and CEL and CWN layer nffet CAA and CEL and CPG and CSN labels CEL layer pffet CAA and CEL and CPG and CWN labels CEL layer m2c CVA grow 150 shrink 50 and CMS and CMF layer electrode CEL labels CEL layer ec CCE grow 60 and CMF and CEL layer cc CCE grow 60 and CMF and CEL and CPG layer cap CPG and CEL and-not CAA labels CEL layer psc CCA grow 60 and CAA and CMF layer ndc CCA grow 60 and CAA and CSN and CMF layer pdc CCA grow 60 and CAA and CWN and CMF layer nsc CCA grow 60 and CAA and CSN and CWN and CMF layer m3c CVS grow 60 and CMT and CMS and-not XP layer gc CCC layer pbc CCA grow 60 and CBA and CMF layer col CX and CAA and CSN and CWN labels CAA layer clc CCA grow 60 and CX and CAA and CSN and CWN and CMF labels CCA layer emit CBA and CSN shrink 120 layer emc CCA grow 60 and CBA and CSN and CMF layer pc CCP grow 60 and CPG and CMF layer nbd CSN shrink 120 and CCD and CAA and-not CPG layer nbdc CCA grow 60 and CCD and CSN and CAA layer bd CPG or CEL and CCD and CAA labels CCD layer glass COG layer pad CMF shrink 60 and CMS shrink 300 and CVA shrink 60 and COG grow 360 and XP calma CWN 42 * calma CAA 43 * calma CSN 45 * calma CPG 46 * calma CCP 47 * calma CCA 48 * calma CMF 49 * calma CVA 50 * calma CMS 51 * calma COG 52 * calma CCE 55 * calma CEL 56 * calma CCD 57 * calma CBA 58 * calma CWC 59 * calma CX 60 * style lambda=0.6(pwell) scalefactor 60 layer pwell CWP labels CWP layer m3 CMT and-not XP labels CMT layer m2 CMS labels CMS layer m1 CMF labels CMF layer poly CPG labels CPG layer nsd CAA and CSN layer ndiff CWP and CSN and CAA layer pdiff CAA and CSP and-not CPS layer psd CWP and CSP and CAA layer pfet CPG and CAA and CSP layer nfet CAA and CPG and CSN and CWP layer epfet CEL and CAA and CSP layer enfet CAA and CEL and CSN and CWP layer m2c CVA grow 60 and CMS and CMF labels CMS layer electrode CEL labels CEL layer ec CCE grow 60 and CMF and CEL labels CMF layer cc CCE grow 60 and CMF and CEL and CPG labels CMF layer cap CPG and CEL and-not CAA labels CEL layer nsc CCA grow 60 and CAA and CSN and CMF layer pdc CCA grow 60 and CAA and CSP and CMF layer ndc CCA grow 60 and CSN and CAA and CWP and CMF layer psc CCA grow 60 and CAA and CSP and CWP and CMF layer pc CCP grow 60 and CPG and CMF layer m3c CVS grow 60 and CMT and CMS and-not XP layer glass COG layer open CAA and CCA and CVA and COG and COP layer pstop CAA and CPS and CSP and-not CWP layer pad CMF shrink 60 and CMS shrink 300 and CVA shrink 60 and XP and COG grow 360 calma COP 23 * calma CPS 24 * calma XP 26 * calma CWP 41 * calma CAA 43 * calma CSP 44 * calma CSN 45 * calma CPG 46 * calma CCP 47 * calma CCA 48 * calma CMF 49 * calma CVA 50 * calma CMS 51 * calma COG 52 * calma CCE 55 * calma CEL 56 * calma CVS 61 * calma CMT 62 * style lambda=0.6(nowell) scalefactor 60 layer poly CPG labels CPG layer pdiff CSP and CAA and CWN layer ndiff CWP or CWC and CAA and CSN and-not CCD layer nsd CWN and CSN and CAA layer psd CWP and CSP and CAA layer pbase CBA labels CBA layer nfet CPG and CAA and CSN and-not CCD layer pfet CAA and CPG and CSP layer enfet CEL and CAA and CSN and-not CCD layer epfet CAA and CEL and CSP layer nffet CAA and CEL and CPG and CSN and CWP layer pffet CAA and CEL and CPG and CSP and CWN layer ndc CWP or CWC and CCA grow 60 and CAA and CSN and CMF layer pdc CCA grow 60 and CAA and CWN and CSP and CMF layer nsc CCA grow 60 and CAA and CSN and CWN and CMF layer psc CCA grow 60 and CAA and CSP and CWP and CMF layer gc CCC layer m2c CVA grow 60 and CMS and CMF labels CMS layer m3c CVS grow 60 and CMT and CMS and-not XP layer electrode CEL labels CEL layer ec CCE grow 60 and CMF and CEL labels CMF layer cc CCE grow 60 and CMF and CEL and CPG labels CMF layer cap CPG and CEL and-not CAA labels CEL layer pbc CCA grow 60 and CBA and CMF labels CBA layer col CX and CAA and CSN and CWN labels CAA layer clc CCA grow 60 and CX and CAA and CSN and CWN and CMF labels CCA layer emit CBA and CSN shrink 120 labels CBA layer emc CCA grow 60 and CBA and CSN and CMF labels CBA layer pc CCP grow 60 and CPG and CMF layer nbd CSN shrink 120 and CCD and CAA and-not CPG layer nbdc CCA grow 60 and CCD and CSN and CAA layer bd CPG or CEL and CCD and CAA labels CCD layer cwell CWC labels CWC layer glass COG layer open CAA and CCA and CVA and COG and COP layer pstop CAA and CPS and CSP and-not CWP and-not CWN layer pad CMF shrink 60 and CMS shrink 300 and CVA shrink 60 and XP and COG grow 360 layer m1 CMF labels CMF layer m2 CMS labels CMS layer m3 CMT and-not XP labels CMT calma COP 23 * calma CPS 24 * calma CCC 25 * calma XP 26 * calma CWP 41 * calma CWN 42 * calma CAA 43 * calma CSP 44 * calma CSN 45 * calma CPG 46 * calma CCP 47 * calma CCA 48 * calma CMF 49 * calma CVA 50 * calma CMS 51 * calma COG 52 * calma CCE 55 * calma CEL 56 * calma CCD 57 * calma CBA 58 * calma CWC 59 * calma CVS 61 * calma CMT 62 * calma CX 63 * style lambda=1.0(cmosn) scalefactor 100 layer nwell NWN labels NWN layer pwell NWP labels NWP layer m2 NMS labels NMS layer m1 NMF labels NMF layer poly NPG labels NPG layer pdiff NSP and NAA and NWN layer ndiff NSN and NAA layer nsd NWN and NSN and NAA layer psd NSP and NAA and-not NWN layer nfet NPG and NAA and NSN layer pfet NAA and NPG and NSP layer enfet NEL and NAA and NSN layer epfet NAA and NEL and NSP layer electrode NEL labels NEL layer cap NPG and NEL and-not NAA labels NEL layer gc NCT layer m2c NVA and NMS and NMF labels NMS layer open NAA and NCT and NVA and NOG and NOP layer pstop NAA and NPS and NSP and-not NWP and-not NWN layer pad NMF shrink 100 and NMS shrink 500 and NVA shrink 100 and NOG grow 600 and XP calma NWN 1 * calma NWP 2 * calma NAA 3 * calma NPG 4 * calma NEL 5 * calma NSN 7 * calma NSP 8 * calma NCT 9 * calma NMF 10 * calma NVA 11 * calma NMS 12 * calma NOG 13 * # 914 "scmos.tech.in" 2 # 928 "scmos.tech.in" end mzrouter style irouter layer m2 32 64 256 1 layer m1 64 32 256 1 layer poly 128 128 512 1 contact m2contact metal1 metal2 1024 contact pcontact metal1 poly 2056 notactive poly pcontact style garouter layer m2 32 64 256 1 layer m1 64 32 256 1 contact m2contact metal1 metal2 1024 end drc # 960 "scmos.tech.in" edge4way (~nwell)/w nwell 10 nwell nwell 10 "N-Well width must be at least 10 (MOSIS rule #1.1)" edge4way (~pwell)/w pwell 10 pwell pwell 10 "P-Well width must be at least 10 (MOSIS rule #1.1)" # 980 "scmos.tech.in" edge4way nwell (~nwell)/w 9 (~nwell)/w (~nwell)/w 9 "N-Well spacing must be at least 9 (MOSIS rule #1.2)" edge4way pwell (~pwell)/w 9 (~pwell)/w (~pwell)/w 9 "P-Well spacing must be at least 9 (MOSIS rule #1.2)" # 1018 "scmos.tech.in" width ndiff,ndc/a,nfet,enfet,nffet,wcap 3 "N-type Diffusion width must be at least 3 (MOSIS rule #2.1a)" width pdiff,pdc/a,pfet,epfet,pffet 3 "P-type Diffusion width must be at least 3 (MOSIS rule #2.1b)" width nsd,nsc/a,psd,psc/a 3 "Ohmic diffusion width must be at least 3 (MOSIS rule #2.1c)" spacing ndiff,ndc/a,nfet,enfet,nffet,wcap ndiff,ndc/a,nfet,enfet,nffet,wcap 3 touching_ok "Diffusion spacing must be at least 3 (MOSIS rule #2.2)" spacing pdiff,pdc/a,pfet,epfet,pffet pdiff,pdc/a,pfet,epfet,pffet 3 touching_ok "Diffusion spacing must be at least 3 (MOSIS rule #2.2)" spacing nsd,nsc/a nsd,nsc/a 3 touching_ok "Diffusion spacing must be at least 3 (MOSIS rule #2.2)" spacing psd,psc/a psd,psc/a 3 touching_ok "Diffusion spacing must be at least 3 (MOSIS rule #2.2)" spacing ndiff,ndc/a pdiff,pdc/a 10 touching_illegal "P-type diffusion must be 10 away from N-type diffusion (MOSIS rule #2.3a)" # 1051 "scmos.tech.in" spacing ndiff,ndc/a nsd,nsc/a 8 touching_illegal "N-type diffusion must be 8 away from N-substrate contact (MOSIS rule #2.3a,4a)" spacing pdiff,pdc/a psd,psc/a 8 touching_illegal "P-type diffusion must be 8 away from P-substrate contact (MOSIS rule #2.3a,4a)" spacing nsd,nsc/a psd,psc/a 6 touching_illegal "Opposite well contacts must be separated by 6 (MOSIS rule #2.4)" # 1068 "scmos.tech.in" spacing ndiff,ndc/a,nfet,enfet,nffet,wcap nwell 5 touching_illegal "N-diffusion and N-well must be separated by 5 (MOSIS rule #2.3a)" spacing pdiff,pdc/a,pfet,epfet,pffet pwell 5 touching_illegal "P-diffusion and P-well must be separated by 5 (MOSIS rule #2.3a)" spacing nsd,nsc/a pwell 3 touching_illegal "N-substrate diffusion and P-well must be separated by 3 (MOSIS rule #2.4)" spacing psd,psc/a nwell 3 touching_illegal "P-substrate diffusion and N-well must be separated by 3 (MOSIS rule #2.4)" spacing ndiff,ndc/a,nfet,enfet,nffet,wcap psd,psc/a 4 touching_ok "Opposite diffusion spacing must be at least 4 (MOSIS extension rule)" spacing pdiff,pdc/a,pfet,epfet,pffet nsd,nsc/a 4 touching_ok "Opposite diffusion spacing must be at least 4 (MOSIS extension rule)" width poly,pc/a,nfet,pfet,wcap,cap,capc/a,nffet,pffet 2 "Polysilicon width must be at least 2 (MOSIS rule #3.1)" spacing poly,pc/a,nfet,pfet,wcap,cap,capc/a,nffet,pffet poly,pc/a,nfet,pfet,wcap,cap,capc/a,nffet,pffet 2 touching_ok "Polysilicon spacing must be at least 2 (MOSIS rule #3.2a)" edge4way nfet,pfet poly,pc/act 2 poly,pc/act 0 0 "Poly must overhang transistor by at least 2 (MOSIS rule #3.3)" edge4way nfet,enfet ndiff,ndc/a 3 ndiff,ndc/a,nfet,enfet,nffet,wcap ndiff,ndc/a 3 "Diffusion must overhang transistor by at least 3 (MOSIS rule #3.4)" edge4way pfet,epfet pdiff,pdc/a 3 pdiff,pdc/a,pfet,epfet,pffet ndiff,ndc/a 3 "Diffusion must overhang transistor by at least 3 (MOSIS rule #3.4)" edge4way nfet,pfet space 1 poly 0 0 "Transistor overhang is missing (MOSIS rule #3.3,4)" edge4way enfet,epfet space 1 poly2 0 0 "Transistor overhang is missing (MOSIS rule #3.3,4)" edge4way nffet,pffet space 1 poly 0 0 "Transistor overhang is missing (MOSIS rule #3.3,4)" edge4way nffet,pffet space 1 poly2 0 0 "Transistor overhang is missing (MOSIS rule #3.3,4)" edge4way ndiff,ndc/a,pdiff,pdc/a,nsd,nsc/a,psd,psc/a poly,pc 1 space/a 0 1 "Poly and diffusion must be separated by at least 1 (MOSIS rule #3.5)" edge4way poly,pc ndiff,ndc/a,pdiff,pdc/a,nsd,nsc/a,psd,psc/a 1 space/a 0 1 "Poly and diffusion must be separated by at least 1 (MOSIS rule #3.5)" edge poly,pc space/a 1 space/a space/a 1 "Poly and diffusion must be separated by at least 1 (MOSIS rule #3.5)" edge nsd,nsc/a,psd,psc/a,ndiff,ndc/a,pdiff,pdc/a space/a 1 space/a space/a 1 "Poly and diffusion must be separated by at least 1 (MOSIS rule #3.5)" # 1157 "scmos.tech.in" spacing pfet,epfet,pffet nsd,nsc/a 3 touching_illegal "Transistors must be separated from substrate contacts by 3 (MOSIS rule #4.1.a)" spacing nfet,enfet,nffet psd,psc/a 3 touching_illegal "Transistors must be separated from substrate contacts by 3 (MOSIS rule #4.1.b)" edge4way psd,psc/a space/act 3 ~(nfet,enfet,nffet)/act psd,psc/a,ndiff,ndc/a 3 "Transistors must be separated from selects(generated by well cont) by 3 (MOSIS rule #4.1.c)" edge4way nsd,nsc/a space/act 3 ~(pfet,epfet,pffet)/act nsd,nsc/a,pdiff,pdc/a 3 "Transistors must be separated from selects(generated by well cont) by 3 (MOSIS rule #4.1.d)" edge4way psd,psc/a ~(ndiff,ndc,psc,psd)/act 4 ~(nfet,enfet)/act ~(ndiff,ndc,psc,psd)/act 4 "Transistors must be separated from selects(generated by well cont) by 4 (MOSIS rule #4.1.e)" edge4way nsd,nsc/a ~(pdiff,pdc,nsc,nsd)/act 4 ~(pfet,epfet)/act ~(pdiff,pdc,nsc,nsd)/act 4 "Transistors must be separated from selects(generated by well cont) by 4 (MOSIS rule #4.1.f)" edge4way ~(pdiff,pdc/a,pfet,epfet,pffet)/act pdiff,pdc,pfet 4 ~(nsd,nsc/a)/act pdiff,pdc/a,pfet,epfet,pffet 2 "Backedge of diffusion must be 4 from substrate diff (MOSIS rule #4.2.a)" edge4way ~(ndiff,ndc/a,nfet,enfet,nffet,wcap)/act ndiff,ndc,nfet 4 ~(psd,psc/a)/act ndiff,ndc/a,nfet,enfet,nffet,wcap 2 "Backedge of diffusion must be 4 from substrate diff (MOSIS rule #4.2.b)" # 1191 "scmos.tech.in" width pc 4 "Poly contact width must be at least 4 (MOSIS rule #5B.1,2,3)" # 1200 "scmos.tech.in" edge4way poly,pc/a,nfet,pfet,wcap,cap,capc/a,nffet,pffet ~(poly,pc/a,nfet,pfet,wcap,cap,capc/a,nffet,pffet)/act 3 ~pc/act ~(poly,pc/a,nfet,pfet,wcap,cap,capc/a,nffet,pffet)/act 3 "Poly contact must be at least 3 from other poly (MOSIS rule #5B.4,5)" spacing pc ndiff,ndc/a,nfet,enfet,nffet,wcap,pdiff,pdc/a,pfet,epfet,pffet,nsd,nsc/a,psd,psc/a 1 touching_illegal "Poly contact must be 1 unit from diffusion (MOSIS rule #5B.6)" # 1217 "scmos.tech.in" width ndc,pdc 4 "Diffusion contact width must be at least 4 (MOSIS rule #6B.1,2,3)" width nsc,psc 4 "Substrate contact width must be at least 4 (MOSIS rule #6B.1,2,3)" # 1241 "scmos.tech.in" edge4way ndiff,ndc/a,nfet,enfet,nffet,wcap,pdiff,pdc/a,pfet,epfet,pffet,nsd,nsc/a,psd,psc/a ~(ndiff,ndc/a,nfet,enfet,nffet,wcap,pdiff,pdc/a,pfet,epfet,pffet,nsd,nsc/a,psd,psc/a)/act 4 ~(ndc,pdc,nsc,psc)/act ~(ndiff,ndc/a,nfet,enfet,nffet,wcap,pdiff,pdc/a,pfet,epfet,pffet,nsd,nsc/a,psd,psc/a)/act 4 "Diffusion contacts must be 4 from other diffusions (MOSIS rule #6B.4,5)" spacing pdc,ndc,psc,nsc nfet,enfet,nffet,pfet,epfet,pffet 1 touching_illegal "Diffusion contacts cannot touch transistors (MOSIS rule #6B.6)" spacing pdc,ndc,psc,nsc poly 1 touching_illegal "Diffusion contact to field poly must be at least 1 (MOSIS rule #6B.7)" spacing pdc,ndc,psc,nsc pc/act 2 touching_illegal "Poly contacts must be 2 away from diffusion contacts (MOSIS rule #6B.9)" # 1266 "scmos.tech.in" edge4way m3c/m3 ~m3c/m3 1 ~m3c/m3 (~m3c,m3c)/m3 1 "Metal3 contacts must be rectangular (Magic rules)" edge4way m2c/m2 ~m2c/m2 1 ~m2c/m2 (~m2c,m2c)/m2 1 "Metal2 contacts must be rectangular (Magic rules)" edge4way ndc/m1 ~ndc/m1 1 ~ndc/m1 (~ndc,ndc)/m1 1 "N-diffusion contacts must be rectangular (Magic rules)" edge4way pdc/m1 ~pdc/m1 1 ~pdc/m1 (~pdc,pdc)/m1 1 "P-diffusion contacts must be rectangular (Magic rules)" edge4way psc/m1 ~psc/m1 1 ~psc/m1 (~psc,psc)/m1 1 "P-substrate contacts must be rectangular (Magic rules)" edge4way nsc/m1 ~nsc/m1 1 ~nsc/m1 (~nsc,nsc)/m1 1 "N-substrate contacts must be rectangular (Magic rules)" edge4way pc/m1 ~pc/m1 1 ~pc/m1 (~pc,pc)/m1 1 "Polysilicon contacts must be rectangular (Magic rules)" edge4way ec/m1 ~ec/m1 1 ~ec/m1 (~ec,ec)/m1 1 "Electrode contacts must be rectangular (Magic rules)" edge4way cc/m1 ~cc/m1 1 ~cc/m1 (~cc,cc)/m1 1 "Capacitor contacts must be rectangular (Magic rules)" edge4way emc/m1 ~emc/m1 1 ~emc/m1 (~emc,emc)/m1 1 "Emitter contacts must be rectangular (Magic rules)" edge4way clc/m1 ~clc/m1 1 ~clc/m1 (~clc,clc)/m1 1 "Collector contacts must be rectangular (Magic rules)" edge4way pbc/m1 ~pbc/m1 1 ~pbc/m1 (~pbc,pbc)/m1 1 "P-base Contacts must be rectangular (Magic rules)" edge4way nbdc/m1 ~nbdc/m1 1 ~nbdc/m1 (~nbdc,nbdc)/m1 1 "CCD-diffusion Contacts must be rectangular (Magic rules)" width pdc/m1,ndc/m1,psc/m1,nsc/m1,hpdc/m1,hndc/m1,hpsc/m1,hnsc/m1,pc/m1,ec/m1,capc/m1,clc/m1,emc/m1,pbc/m1,nbdc/m1,m1,m2c/m1,gc,pad/m1 3 "First-level metal width must be at least 3 (MOSIS rule #7.1)" spacing pdc/m1,ndc/m1,psc/m1,nsc/m1,hpdc/m1,hndc/m1,hpsc/m1,hnsc/m1,pc/m1,ec/m1,capc/m1,clc/m1,emc/m1,pbc/m1,nbdc/m1,m1,m2c/m1,gc,pad/m1 pdc/m1,ndc/m1,psc/m1,nsc/m1,hpdc/m1,hndc/m1,hpsc/m1,hnsc/m1,pc/m1,ec/m1,capc/m1,clc/m1,emc/m1,pbc/m1,nbdc/m1,m1,m2c/m1,gc,pad/m1 3 touching_ok "First-level metal spacing must be at least 3 (MOSIS rule #7.2)" # 1319 "scmos.tech.in" width m2c 4 "Contact width must be at least 4 (MOSIS rule #8.1,2,3)" # 1328 "scmos.tech.in" edge4way poly,pc/a,nfet,pfet,wcap,cap,capc/a,nffet,pffet ~(poly,pc/a,nfet,pfet,wcap,cap,capc/a,nffet,pffet)/a 1 ~m2c/m2 ~(poly,pc/a,nfet,pfet,wcap,cap,capc/a,nffet,pffet)/a 1 "Via must be on a flat surface (MOSIS rule #8.4,5)" metal2 edge4way poly2,ec/a,enfet,epfet,cap,capc/a,nffet,pffet,hnfet,hpfet ~(poly2,ec/a,enfet,epfet,cap,capc/a,nffet,pffet,hnfet,hpfet)/a 1 ~m2c/m2 ~(poly2,ec/a,enfet,epfet,cap,capc/a,nffet,pffet,hnfet,hpfet)/a 1 "Via must be on a flat surface (MOSIS rule #8.4,5)" metal2 edge4way ndiff,ndc/a,nfet,enfet,nffet,wcap,pdiff,pdc/a,pfet,epfet,pffet,nsd,nsc/a,psd,psc/a ~(ndiff,ndc/a,nfet,enfet,nffet,wcap,pdiff,pdc/a,pfet,epfet,pffet,nsd,nsc/a,psd,psc/a)/a 1 ~m2c/m2 ~(ndiff,ndc/a,nfet,enfet,nffet,wcap,pdiff,pdc/a,pfet,epfet,pffet,nsd,nsc/a,psd,psc/a)/a 1 "Via must be on a flat surface (MOSIS rule #8.4,5)" metal2 edge4way ~(poly,pc/a,nfet,pfet,wcap,cap,capc/a,nffet,pffet)/a poly,pc/a,nfet,pfet,wcap,cap,capc/a,nffet,pffet 1 ~m2c/m2 poly,pc/a,nfet,pfet,wcap,cap,capc/a,nffet,pffet 1 "Via must be on a flat surface (MOSIS rule #8.4,5)" metal2 edge4way ~(poly2,ec/a,enfet,epfet,cap,capc/a,nffet,pffet,hnfet,hpfet)/a poly2,ec/a,enfet,epfet,cap,capc/a,nffet,pffet,hnfet,hpfet 1 ~m2c/m2 poly2,ec/a,enfet,epfet,cap,capc/a,nffet,pffet,hnfet,hpfet 1 "Via must be on a flat surface (MOSIS rule #8.4,5)" metal2 edge4way ~(ndiff,ndc/a,nfet,enfet,nffet,wcap,pdiff,pdc/a,pfet,epfet,pffet,nsd,nsc/a,psd,psc/a)/a ndiff,ndc/a,nfet,enfet,nffet,wcap,pdiff,pdc/a,pfet,epfet,pffet,nsd,nsc/a,psd,psc/a 1 ~m2c/m2 ndiff,ndc/a,nfet,enfet,nffet,wcap,pdiff,pdc/a,pfet,epfet,pffet,nsd,nsc/a,psd,psc/a 1 "Via must be on a flat surface (MOSIS rule #8.4,5)" metal2 # 1348 "scmos.tech.in" width m2,m2c/m2,m3c/m2,pad 3 "Second-level metal width must be at least 3 (MOSIS rule #9.1)" # 1360 "scmos.tech.in" spacing m2,m2c/m2,m3c/m2,pad m2,m2c/m2,m3c/m2,pad 4 touching_ok "Second-level metal spacing must be at least 4 (MOSIS rule #9.2a)" # 1418 "scmos.tech.in" width cap,capc/a 2 "Electrode capacitor width must be at least 3 (MOSIS rule #11.1)" spacing poly2,ec/a,enfet,epfet,cap,capc/a,nffet,pffet,hnfet,hpfet poly2,ec/a,enfet,epfet,cap,capc/a,nffet,pffet,hnfet,hpfet 3 touching_ok "Second-level poly spacing must be at least 3 (MOSIS rule #11.2,12.2)" edge4way cap,cc space 1 0 0 0 "Cap must be overlapped by poly or poly2 (MOSIS rule #11.3)" edge4way cap,cc poly 2 poly poly 2 "Cap must be overlapped by poly or poly2 (MOSIS rule #11.3)" edge4way cap,cc poly2 2 poly2 poly2 2 "Cap must be overlapped by poly or poly2 (MOSIS rule #11.3)" edge4way nw,pw,cw ~(nw,pw,cw)/w 2 ~(cap,cc)/a ~(nw,pw,cw)/w 2 "Cap must be on a flat surface (MOSIS rule #11.4)" active edge4way ~(nw,pw,cw)/w nw,pw,cw 2 ~(cap,cc)/a nw,pw,cw 2 "Cap must be on a flat surface (MOSIS rule #11.4)" active edge4way cap ~(cap)/a 2 nfet,enfet,nffet,pfet,epfet,pffet,poly,poly2,space/a,cc/a ndiff,ndc/a,pdiff,pdc/a,poly 2 "Cap must be on a flat surface (MOSIS rule #11.4)" active # 1449 "scmos.tech.in" width poly2,ec/a,enfet,epfet,cap,capc/a,nffet,pffet,hnfet,hpfet 2 "Electrode width must be at least 2 (MOSIS rule #12.1)" edge4way enfet,epfet poly2,ec/a 2 poly2,ec/a 0 0 "Poly2 must overhang transistor by at least 2 (MOSIS rule #12.3)" edge4way nffet,pffet cap 2 cap 0 0 "Cap must overhang transistor by at least 2 (MOSIS rule #12.3)" edge4way nffet ~(cap,nffet,enfet,nfet)/a 2 cap 0 0 "Cap must overhang doubletransistor by at least 2 (MOSIS rule #12.3)" edge4way pffet ~(cap,pffet,epfet,pfet)/a 2 cap 0 0 "Cap must overhang doubletransistor by at least 2 (MOSIS rule #12.3)" edge4way ndiff,ndc/a,pdiff,pdc/a,nsd,nsc/a,psd,psc/a el 1 space/a 0 1 "Poly2 and diffusion must be separated by at least 1 (MOSIS rule #12.4)" spacing poly2,ec/a,enfet,epfet,cap,capc/a,nffet,pffet,hnfet,hpfet pc,ndc,pdc 2 touching_illegal "Poly2 spacing to poly or diffusion contact must be at least 3 (MOSIS rule #12.6)" # 1490 "scmos.tech.in" width ec,capc 4 "Electrode contact width must be at least 4 (MOSIS rule #13.1)" edge4way ec/a space 1 poly2 poly2 1 "Electrode contact must be overlaped by poly2 (MOSIS rule #13.4)" edge4way ec/a poly2 1 poly2 poly2 1 "Electrode contact must be overlaped by poly2 by 1 (MOSIS rule #13.4)" edge4way ndiff,ndc/a,pdiff,pdc/a,nsd,nsc/a,psd,psc/a ec 2 space/a 0 2 "Poly2 and diffusion contact must be separated by at least 2 (MOSIS rule #13.5)" # 1512 "scmos.tech.in" width m3c 4 "Third-level metal contact width must be at least 4 (MOSIS rule #14.1,2,3)" # 1528 "scmos.tech.in" width m3,m3c/m3 6 "Third-level metal width must be at least 6 (MOSIS rule #15.1a)" # 1537 "scmos.tech.in" spacing m3,m3c/m3 m3,m3c/m3 4 touching_ok "Third-level metal spacing must be at least 4 from other third-level metal (MOSIS rule #15.2a)" edge4way m3c/m3 ~m3c/m3 1 m3 m3 1 "Mimimum metal3 overlap of via must be at least 1 (MOSIS rule #15.3)" # 1552 "scmos.tech.in" width clc,pbc,emc 4 "Transistor contact width must be at least 4 (MOSIS rule #16.1)" # 1562 "scmos.tech.in" edge4way emc/a,emit pbase 4 pbase pbase 4 "Pbase overlap of emitter must be at least 4 (MOSIS rule #16.3)" spacing pbc emc/a,emit 7 touching_illegal "Base must be 7 (4+2+1) away from emitter (MOSIS rule #16.3,4,11)" edge4way pbc (~pbc)/a 3 pb,pbc/a pb,pbc/a 3 "Pbase overlap of base contact must be at least 3 (MOSIS rule #16.5)" # 1584 "scmos.tech.in" width col,clc/a 6 "Collector width must be at least 6 (MOSIS rule #16.6)" edge4way pbase space/a 6 nwell space/a 6 "Nwell overlap of Pbase must be at least 6 (MOSIS rule #16.7)" well edge4way pbase (~pbase)/a 4 ~(col,clc)/a ~(col,clc)/a 4 "Pbase must be at least 4 away from collector (MOSIS rule #16.8)" edge4way clc (~clc)/a 1 col col 1 "Collector overlap of contact must be at least 1 (MOSIS rule #16.9)" edge4way nw ~(nw)/w 3 ~(col,clc)/a ~(nw)/w 3 "N-well overlap of collector must be at least 3 (MOSIS rule #16.11)" active edge4way ~(nw)/w nw 3 ~(col,clc)/a nw 3 "N-well overlap of collector must be at least 3 (MOSIS rule #16.11)" active width em,emc/a 4 "Emitter width must be at least 4 (Magic Bipolar Transistor rule)" spacing em,emc/a em,emc/a 7 touching_ok "Unrelated emitter must be at least 7 apart (Magic Bipolar transistor rule)" width pbase,pbc/a 4 "Pbase width must be at least 4 (MOSIS extension rule)" spacing pbase,pbc/a pbase,pbc/a 4 touching_ok "Pbase spacing must be at least 4 (MOSIS extension rule)" # 1637 "scmos.tech.in" width cwell 10 "Cap-well width must be at least 10 (MOSIS rule #17.1)" spacing cwell cwell 9 touching_ok "Cap-well spacing must be at least 9 (MOSIS rule #17.2)" spacing cwell nwell 9 touching_illegal "Cap-well spacing must be at least 9 (MOSIS rule #17.2)" edge4way cwell space 5 ~(ndiff,ndc/a,nfet,enfet,nffet,wcap)/a ~(ndiff,ndc/a,nfet,enfet,nffet,wcap)/w 5 "Cap-well spacing to external active must be at least 5 (MOSIS rule #17.3)" active edge4way cwell space 3 ~(psd,psc/a)/a ~(psd,psc/a)/w 3 "P-substrate diffusion and Cap-well must be separated by 3 (MOSIS rule #17.3)" active edge4way space cwell 3 (space,poly,pc)/a 0 0 "Cap-well overlap of diffusion must be at least 3 (MOSIS rule #17.4)" active # 1667 "scmos.tech.in" width wcap 3 "Well-capacitor must be at least 3 (MOSIS rule #18.1)" edge4way wcap space 1 poly poly 1 "Well-capacitor overhang is missing (MOSIS rule #18.3)" edge4way wcap ndiff 3 ndiff ndiff 3 "N-diffusion overlap of well-capacitor must be at least 3 (MOSIS rule #18.4)" spacing wcap pc 2 touching_illegal "Well-capacitor spacing to poly contact must be at least 2 (MOSIS rule #18.5)" spacing wcap ndc 4 touching_illegal "Well-capacitor spacing to diffusion contact must be at least 4 (MOSIS rule #18.6)" # 1698 "scmos.tech.in" width nbd,nbdc,bd/a 4 "CCD channel width must be at least 4 (MOSIS rule #19.1)" width nbdc 4 "CCD contact width must be at least 4 (MOSIS rule #19.1)" # 1712 "scmos.tech.in" edge4way nbd,nbdc ~(bd,nbd,nbdc)/a 4 (bd,space)/i 0 0 "CCD channel spacing must be at least 4 (MOSIS rule #19.2)" implant edge4way nbd,nbdc ~(poly,nbd,nbdc)/a 4 ~(poly,nbd,nbdc)/a ~(poly,nbd,nbdc)/a 4 "CCD channel spacing must be at least 4 (MOSIS rule #19.2)" active edge4way bd space 2 nbd,poly,cap,el 0 0 "CCD channel overhang is missing (MOSIS rule #19.6)" active spacing nbdc poly,el 1 touching_illegal "CCD-diffusion contact spacing to poly must be at least 1 (MOSIS CCD rule)" edge4way nbd poly,el 1 bd 0 0 "Missing Buried CCD Difussion layer (MOSIS CCD rule)" implant # 1744 "scmos.tech.in" edge (~hnwell)/w hnwell 10 hnwell hnwell 10 "High-Voltage N-Well width must be at least 10 (MOSIS rule #1.1)" edge (~hpwell)/w hpwell 10 hpwell hpwell 10 "High-Voltage P-Well width must be at least 10 (MOSIS rule #1.1)" edge hnwell space,pw,hpw 9 space,pw,hpw space,pw,hpw 9 "High-Voltage N-Well spacing to N-Well must be at least 9 (MOSIS rule #1.2)" edge hpwell space,nw,hnw 9 space,nw,hnw space,nw,hnw 9 "High-Voltage P-Well spacing to P-Well must be at least 9 (MOSIS rule #1.2)" edge hnwell space,pw,hpw,nw 12 space,pw,hpw,nw space,pw,hpw,nw 12 "High-Voltage N-Well spacing must be at least 12 (MOSIS rule #20.1)" edge hpwell space,nw,hnw,pw 12 space,nw,hnw,pw space,nw,hnw,pw 12 "High-Voltage P-Well spacing must be at least 12 (MOSIS rule #20.1)" edge4way ~(hndiff,hndc/a,hpdiff,hpdc/a)/a hndiff,hndc/a,hpdiff,hpdc/a 3 hndiff,hndc/a,hpdiff,hpdc/a hndiff,hndc/a,hpdiff,hpdc/a 3 "High-Voltage Diffusion width must be at least 3 (MOSIS rule #2.1)" spacing hndiff,hndc/a,hnfet hndiff,hndc/a,hnfet 5 touching_ok "High-Voltage Diffusion spacing must be at least 5 (MOSIS rule #20.2)" spacing hpdiff,hpdc/a,hpfet hpdiff,hpdc/a,hpfet 5 touching_ok "High-Voltage Diffusion spacing must be at least 5 (MOSIS rule #20.2)" spacing hndiff,hndc/a hpdiff,hpdc/a 14 touching_illegal "P-type diffusion must be 14 away from N-type diffusion (MOSIS rule #20.3)" spacing hndiff,hndc/a pdiff,pdc/a 12 touching_illegal "P-type diffusion must be 12 away from N-type diffusion (MOSIS rule #20.3+2.3)" spacing hpdiff,hpdc/a ndiff,ndc/a 12 touching_illegal "P-type diffusion must be 12 away from N-type diffusion (MOSIS rule #20.3+2.3)" spacing hndiff,hnfet,hndc/a hnwell 7 touching_illegal "HVN-diffusion and HVN-well must be separated by 7 (MOSIS rule #20.3)" spacing hpdiff,hpfet,hpdc/a hpwell 7 touching_illegal "HVP-diffusion and HVP-well must be separated by 7 (MOSIS rule #20.3)" spacing nsd,nsc/a hpwell 3 touching_illegal "N-substrate diffusion and HVP-well must be separated by 3 (MOSIS rule #2.4+20.3)" spacing psd,psc/a hnwell 3 touching_illegal "P-substrate diffusion and HVN-well must be separated by 3 (MOSIS rule #2.4+20.3)" # 1798 "scmos.tech.in" edge (~hndc)/a hndc/a 6 hndc/a hndc/a 6 "High-Voltage Diffusion contact width must be at least 6 (MOSIS rule #20.5)" edge (~hpdc)/a hpdc/a 6 hpdc/a hpdc/a 6 "High-Voltage Diffusion contact width must be at least 6 (MOSIS rule #20.5)" edge hpdiff,hpdc/a hpfet 4 hpfet 0 0 "High-Voltage transistor must be at least 4 units long (MOSIS rule #20.6)" edge hndiff,hndc/a hnfet 4 hnfet 0 0 "High-Voltage transistor must be at least 4 units long (MOSIS rule #20.6)" exact_overlap m3c,m2c,ndc,pdc,pc,psc,nsc,ec,capc,clc,emc,pbc,hndc,hpdc,hnsc,hpsc no_overlap pfet,nfet pfet,nfet no_overlap epfet,enfet epfet,enfet no_overlap pffet,nffet pffet,nffet no_overlap hpfet,hnfet hpfet,hnfet end extract # 1 "./extract_template/scmosExt.tech.in" 1 # 79 "./extract_template/scmosExt.tech.in" # 1 "./extract_template/scmosExt100.tech.in" 1 # 9 "./extract_template/scmosExt100.tech.in" style lambda=1.0(scna20_orb) cscale 1 lambda 100 step 100 sidehalo 0 areacap (ndiff,nsd,ndc,nsc)/a 0 perimc (ndiff,nsd,ndc,nsc)/a space,pwell 0 areacap (pdiff,psd,pdc,psc)/a 0 perimc (pdiff,psd,pdc,psc)/a space,nwell 0 # 40 "./extract_template/scmosExt100.tech.in" areacap (poly,pc)/a 39 areacap cc/a,cap 39 overlap (poly,pc)/a nwell,pwell 39 areacap poly2,ec/a 50 perimc (poly,pc)/a ~(poly,pc)/a 80 sideoverlap (poly,pc)/a ~(poly,pc)/a nwell,pwell 80 areacap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 47 overlap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 nwell,pwell 47 (poly,pc)/a,(ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a overlap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 (ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a 47 overlap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 (poly,pc)/a 30 overlap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 poly2,cap 40 areacap (m2,m2c,m3c,pad)/m2 19 overlap (m2,m2c,m3c,pad)/m2 nwell,pwell 19 (poly,pc)/a,(m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1,(ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a overlap (m2,m2c,m3c,pad)/m2 (ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a 22 (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 overlap (m2,m2c,m3c,pad)/m2 (poly,pc)/a 19 (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 overlap (m2,m2c,m3c,pad)/m2 poly2 40 (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 overlap (m2,m2c,m3c,pad)/m2 (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 45 device mosfet pfet pfet pdiff,pdc nwell Vdd! 204 450 device mosfet nfet nfet ndiff,ndc pwell Gnd! 150 450 device mosfet epfet epfet pdiff,pdc nwell Vdd! 204 450 device mosfet enfet enfet ndiff,ndc pwell Gnd! 150 450 device capacitor None cap,capc/a poly,pc 120 745 device bjt npn pbase,pbc/a emit,emc/a nwell fetresis nfet linear 14100 fetresis pfet linear 48100 fetresis nfet saturation 14100 fetresis pfet saturation 48100 fetresis enfet linear 14100 fetresis epfet linear 48100 fetresis enfet saturation 14100 fetresis epfet saturation 48100 resist (ndiff,nsd,ndc/act,nsc/act) 26670 resist (pdiff,psd,pdc/act,psc/act) 59550 resist (poly,pc/act,pfet,nfet) 23860 resist poly2,ec/a,enfet,epfet,cap,capc/a,nffet,pffet,hnfet,hpfet 19690 resist em,emc/a 27260 resist pbase,pbc/a 2000000 resist (metal1,m2c/metal1) 49 resist (metal2,via/m2,pad) 26 resist nwell 2505830 contact pc 4 11000 contact ec/a,capc/a 4 9000 contact ndc,pdc,nsc,psc 4 18710 contact pdc/a,psc/a 4 100560 contact m2c 4 30 planeorder implant 0 planeorder well 1 planeorder active 2 planeorder metal1 3 planeorder metal2 4 planeorder metal3 5 planeorder oxide 6 height nwell -0.1 0.1 height ndiff,pdiff,nndiff,ppdiff -0.075 0.075 height poly,pfet,nfet 0.1 0.05 height ndc,pdc,nsc,psc 0.001 0.25 height pc 0.1 0.15 height m1 0.2 0.05 height m2c 0.2 0.15 height m2 0.3 0.05 style lambdaSp=1.0(scpe20_orb) lambda 100 step 100 sidehalo 0 areacap (ndiff,nsd,ndc,nsc)/a 0 perimc (ndiff,nsd,ndc,nsc)/a space,pwell 0 areacap (pdiff,psd,pdc,psc)/a 0 perimc (pdiff,psd,pdc,psc)/a space,nwell 0 # 171 "./extract_template/scmosExt100.tech.in" areacap (poly,pc)/a 57 overlap (poly,pc)/a nwell,pwell 57 perimc (poly,pc)/a ~(poly,pc)/a 168 sideoverlap (poly,pc)/a ~(poly,pc)/a nwell,pwell 168 areacap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 41 overlap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 nwell,pwell 41 (poly,pc)/a,(ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a overlap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 (ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a 41 overlap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 (poly,pc)/a 33 overlap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 poly2,cap 45 areacap (m2,m2c,m3c,pad)/m2 21 overlap (m2,m2c,m3c,pad)/m2 nwell,pwell 21 (poly,pc)/a,(m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1,(ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a overlap (m2,m2c,m3c,pad)/m2 (ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a 21 (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 overlap (m2,m2c,m3c,pad)/m2 (poly,pc)/a 25 (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 overlap (m2,m2c,m3c,pad)/m2 (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 33 fet pfet pdiff,pdc 2 pfet Vdd! nwell 204 450 fet nfet ndiff,ndc 2 nfet Gnd! pwell 150 450 fetresis nfet linear 14100 fetresis pfet linear 48100 fetresis nfet saturation 14100 fetresis pfet saturation 48100 resist (ndiff,nsd,ndc/act,nsc/act) 26670 resist (pdiff,psd,pdc/act,psc/act) 72860 resist (poly,pc/act,pfet,nfet) 23860 resist poly2,ec/a,enfet,epfet,cap,capc/a,nffet,pffet,hnfet,hpfet 18540 resist (metal1,m2c/metal1) 49 resist (metal2,via/m2,pad) 26 resist pwell 2128280 contact pc 4 12800 contact ec/a,capc/a 4 8420 contact (ndc,nsc)/a 4 36660 contact (psc,pdc)/a 4 56300 contact m2c 4 30 planeorder implant 0 planeorder well 1 planeorder active 2 planeorder metal1 3 planeorder metal2 4 planeorder metal3 5 planeorder oxide 6 # 80 "./extract_template/scmosExt.tech.in" 2 # 1 "./extract_template/scmosExt080.tech.in" 1 # 9 "./extract_template/scmosExt080.tech.in" style lambda=0.8(scna16_ami) cscale 1 lambda 80 step 100 sidehalo 0 areacap (ndiff,nsd,ndc,nsc)/a 0 perimc (ndiff,nsd,ndc,nsc)/a space,pwell 0 areacap (pdiff,psd,pdc,psc)/a 0 perimc (pdiff,psd,pdc,psc)/a space,nwell 0 # 40 "./extract_template/scmosExt080.tech.in" areacap (poly,pc)/a 22 overlap (poly,pc)/a nwell,pwell 22 areacap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 20 overlap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 nwell,pwell 20 (poly,pc)/a,(ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a overlap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 (ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a 20 overlap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 (poly,pc)/a 25 areacap (m2,m2c,m3c,pad)/m2 10 overlap (m2,m2c,m3c,pad)/m2 nwell,pwell 12 (poly,pc)/a,(m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1,(ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a overlap (m2,m2c,m3c,pad)/m2 (ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a 12 (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 overlap (m2,m2c,m3c,pad)/m2 (poly,pc)/a 11 (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 overlap (m2,m2c,m3c,pad)/m2 (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 23 fet pfet pdiff,pdc 2 pfet Vdd! nwell 204 450 fet nfet ndiff,ndc 2 nfet Gnd! pwell 150 450 fet epfet pdiff,pdc 2 epfet Vdd! nwell 204 450 fet enfet ndiff,ndc 2 enfet Gnd! pwell 150 450 fetresis nfet linear 14100 fetresis pfet linear 48100 fetresis nfet saturation 14100 fetresis pfet saturation 48100 resist (ndiff,nsd,ndc/act,nsc/act) 51680 resist (pdiff,psd,pdc/act,psc/act) 74800 resist (poly,pc/act,pfet,nfet) 34780 resist poly2,ec/a,enfet,epfet,cap,capc/a,nffet,pffet,hnfet,hpfet 22400 resist (metal1,m2c/metal1) 48 resist (metal2,via/m2,pad) 28 resist nwell 1446400 contact pc 4 61560 contact ec/a,capc/a 4 12010 contact ndc,pdc,nsc,psc 4 45780 contact pdc/a,psc/a 4 32310 contact m2c 4 37570 planeorder implant 0 planeorder well 1 planeorder active 2 planeorder metal1 3 planeorder metal2 4 planeorder metal3 5 planeorder oxide 6 # 81 "./extract_template/scmosExt.tech.in" 2 # 1 "./extract_template/scmosExt060_orb.tech.in" 1 style lambda=0.6(orb_scne12) lambda 60 step 100 sidehalo 0 areacap nwell 35 perimc nwell ~(nwell) 47 areacap ndiff,nsd,ndc/a,nsc/a 0 areacap pdiff,psd,pdc/a,psc/a 0 perimc ndiff,nsd,ndc/a,nsc/a space,pwell 0 perimc pdiff,psd,pdc/a,psc/a space,nwell 0 # 42 "./extract_template/scmosExt060_orb.tech.in" areacap (poly,pc)/a 29 overlap (poly,pc)/a nwell,pwell 29 perimc (poly,pc)/a ~(poly,pc)/a 37 areacap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 16 overlap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 nwell,pwell 16 (poly,pc)/a,(ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a overlap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 (ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a 16 overlap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 (poly,pc)/a 19 perimc (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 ~(m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 41 sideoverlap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 ~(m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 nwell,pwell 41 ((poly,pc)/a,(ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a) sideoverlap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 ~(m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 (ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a 41 areacap (m2,m2c,m3c,pad)/m2 10 overlap (m2,m2c,m3c,pad)/m2 nwell,pwell 10 (poly,pc)/a,(m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1,(ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a overlap (m2,m2c,m3c,pad)/m2 (ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a 10 (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 overlap (m2,m2c,m3c,pad)/m2 (poly,pc)/a 12 (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 overlap (m2,m2c,m3c,pad)/m2 (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 14 perimc (m2,m2c,m3c,pad)/m2 ~(m2,m2c,m3c,pad)/m2 42 sideoverlap (m2,m2c,m3c,pad)/m2 ~(m2,m2c,m3c,pad)/m2 nwell,pwell 42 ((m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1,(poly,pc)/a,(ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a) sideoverlap (m2,m2c,m3c,pad)/m2 ~(m2,m2c,m3c,pad)/m2 (ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a 42 (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 device mosfet pfet pfet pdiff,pdc nwell Vdd! 270 623 device mosfet nfet nfet ndiff,ndc pwell Gnd! 90 623 device capacitor None cap,capc/a poly,pc 90 730 device bjt npn pbase,pbc/a emit,emc/a nwell fetresis nfet linear 9700 fetresis pfet linear 35700 contact pc 4 16210 contact ec 4 13510 contact ndc,nsc, 4 56490 contact pdc,psc, 4 181400 contact m2c 4 43330 resist ndiff,nsd,ndc/a,nsc/a 43180 resist pdiff,psd,pdc/a,psc/a 79770 resist (poly,pc/act,pfet,nfet) 22160 resist poly2,ec/a,enfet,epfet,cap,capc/a,nffet,pffet,hnfet,hpfet 21140 resist (metal1,m2c/metal1) 51 resist (metal2,via/m2,pad) 26 resist nwell 1195000 planeorder implant 0 planeorder well 1 planeorder active 2 planeorder metal1 3 planeorder metal2 4 planeorder metal3 5 planeorder oxide 6 # 82 "./extract_template/scmosExt.tech.in" 2 # 1 "./extract_template/scmosExt34.tech.in" 1 style lambda=0.6(hp) lambda 60 step 100 sidehalo 6 areacap nwell 35 perimc nwell ~(nwell) 47 areacap ndiff,nsd,ndc/a,nsc/a 0 areacap pdiff,psd,pdc/a,psc/a 0 perimc ndiff,nsd,ndc/a,nsc/a space,pwell 0 perimc pdiff,psd,pdc/a,psc/a space,nwell 0 # 42 "./extract_template/scmosExt34.tech.in" areacap (poly,pc)/a 28 overlap (poly,pc)/a nwell,pwell 28 perimc (poly,pc)/a ~(poly,pc)/a 38 sideoverlap (poly,pc)/a ~(poly,pc)/a nwell,pwell 38 sideoverlap (poly,pc)/a ~(poly,pc)/a (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 34 sideoverlap (poly,pc)/a ~(poly,pc)/a (m2,m2c,m3c,pad)/m2 27 (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 sidewall (poly,pc)/a ~(poly,pc)/a ~(poly,pc)/a (poly,pc)/a 15 areacap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 18 overlap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 nwell,pwell 18 (poly,pc)/a,(ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a overlap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 (ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a 46 overlap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 (poly,pc)/a 46 perimc (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 ~(m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 33 sideoverlap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 ~(m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 nwell,pwell 33 ((poly,pc)/a,(ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a) sideoverlap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 ~(m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 (ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a 33 sideoverlap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 ~(m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 (poly,pc)/a 33 sideoverlap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 ~(m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 (m2,m2c,m3c,pad)/m2 28 sidewall (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 ~(m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 ~(m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 27 areacap (m2,m2c,m3c,pad)/m2 9 overlap (m2,m2c,m3c,pad)/m2 nwell,pwell 9 (poly,pc)/a,(m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1,(ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a overlap (m2,m2c,m3c,pad)/m2 (ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a 12 (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 overlap (m2,m2c,m3c,pad)/m2 (poly,pc)/a 14 (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 overlap (m2,m2c,m3c,pad)/m2 (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 30 perimc (m2,m2c,m3c,pad)/m2 ~(m2,m2c,m3c,pad)/m2 22 sideoverlap (m2,m2c,m3c,pad)/m2 ~(m2,m2c,m3c,pad)/m2 nwell,pwell 22 ((m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1,(poly,pc)/a,(ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a) sideoverlap (m2,m2c,m3c,pad)/m2 ~(m2,m2c,m3c,pad)/m2 (ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a 20 (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 sideoverlap (m2,m2c,m3c,pad)/m2 ~(m2,m2c,m3c,pad)/m2 (poly,pc)/a 22 (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 sideoverlap (m2,m2c,m3c,pad)/m2 ~(m2,m2c,m3c,pad)/m2 (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 28 sidewall (m2,m2c,m3c,pad)/m2 ~(m2,m2c,m3c,pad)/m2 ~(m2,m2c,m3c,pad)/m2 (m2,m2c,m3c,pad)/m2 33 fet pfet pdiff,pdc 2 pfet Vdd! nwell 270 623 fet nfet ndiff,ndc 2 nfet Gnd! pwell 90 623 fet wcap ndiff,ndc 1 wcap Gnd! pwell 300 0 fetresis nfet linear 9700 fetresis pfet linear 35700 contact pc 4 16210 contact ndc,nsc, 4 77000 contact pdc,psc, 4 44260 contact m2c 4 150 resist ndiff,nsd,ndc/a,nsc/a 99630 resist pdiff,psd,pdc/a,psc/a 120000 resist (poly,pc/act,pfet,nfet) 25000 resist (metal1,m2c/metal1) 60 resist (metal2,via/m2,pad) 40 resist nwell 1500000 planeorder implant 0 planeorder well 1 planeorder active 2 planeorder metal1 3 planeorder metal2 4 planeorder metal3 5 planeorder oxide 6 # 83 "./extract_template/scmosExt.tech.in" 2 # 1 "./extract_template/scmosExt26b.tech.in" 1 # 13 "./extract_template/scmosExt26b.tech.in" style lambda=0.5 lambda 50 step 100 sidehalo 8 areacap nwell 40 perimc nwell ~(nwell) 100 areacap (ndiff,nsd,ndc,nsc)/a 0 perimc (ndiff,nsd,ndc,nsc)/a space,pwell 0 areacap (pdiff,psd,pdc,psc)/a 0 perimc (pdiff,psd,pdc,psc)/a space,nwell 0 # 51 "./extract_template/scmosExt26b.tech.in" areacap (poly,pc)/a 15 overlap (poly,pc)/a nwell,pwell 15 perimc (poly,pc)/a ~(poly,pc)/a 22 sideoverlap (poly,pc)/a ~(poly,pc)/a nwell,pwell 22 sideoverlap (poly,pc)/a ~(poly,pc)/a (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 10 sideoverlap (poly,pc)/a ~(poly,pc)/a (m2,m2c,m3c,pad)/m2 6 (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 sideoverlap (poly,pc)/a ~(poly,pc)/a (m3,m3c,pad)/m3 4 ((m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1,(m2,m2c,m3c,pad)/m2) sidewall (poly,pc)/a ~(poly,pc)/a ~(poly,pc)/a (poly,pc)/a 11 areacap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 8 overlap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 nwell,pwell 8 (poly,pc)/a,(ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a overlap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 (ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a 14 overlap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 (poly,pc)/a 14 perimc (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 ~(m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 22 sideoverlap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 ~(m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 nwell,pwell 22 ((poly,pc)/a,(ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a) sideoverlap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 ~(m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 (ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a 25 sideoverlap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 ~(m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 (poly,pc)/a 25 sideoverlap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 ~(m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 (m2,m2c,m3c,pad)/m2 12 sideoverlap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 ~(m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 (m3,m3c,pad)/m3 7 (m2,m2c,m3c,pad)/m2 sidewall (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 ~(m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 ~(m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 27 areacap (m2,m2c,m3c,pad)/m2 4 overlap (m2,m2c,m3c,pad)/m2 nwell,pwell 4 (poly,pc)/a,(m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1,(ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a overlap (m2,m2c,m3c,pad)/m2 (ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a 5 (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 overlap (m2,m2c,m3c,pad)/m2 (poly,pc)/a 6 (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 overlap (m2,m2c,m3c,pad)/m2 (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 9 perimc (m2,m2c,m3c,pad)/m2 ~(m2,m2c,m3c,pad)/m2 18 sideoverlap (m2,m2c,m3c,pad)/m2 ~(m2,m2c,m3c,pad)/m2 nwell,pwell 18 ((m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1,(poly,pc)/a,(ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a) sideoverlap (m2,m2c,m3c,pad)/m2 ~(m2,m2c,m3c,pad)/m2 (ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a 19 (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 sideoverlap (m2,m2c,m3c,pad)/m2 ~(m2,m2c,m3c,pad)/m2 (poly,pc)/a 20 (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 sideoverlap (m2,m2c,m3c,pad)/m2 ~(m2,m2c,m3c,pad)/m2 (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 23 sideoverlap (m2,m2c,m3c,pad)/m2 ~(m2,m2c,m3c,pad)/m2 (m3,m3c,pad)/m3 10 sidewall (m2,m2c,m3c,pad)/m2 ~(m2,m2c,m3c,pad)/m2 ~(m2,m2c,m3c,pad)/m2 (m2,m2c,m3c,pad)/m2 33 areacap (m3,m3c,pad)/m3 3 overlap (m3,m3c,pad)/m3 nwell,pwell 3 (poly,pc)/a,(m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1,(m2,m2c,m3c,pad)/m2,(ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a overlap (m3,m3c,pad)/m3 (ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a 3 (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1,(m2,m2c,m3c,pad)/m2 overlap (m3,m3c,pad)/m3 (poly,pc)/a 3 (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1,(m2,m2c,m3c,pad)/m2 overlap (m3,m3c,pad)/m3 (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 4 (m2,m2c,m3c,pad)/m2 overlap (m3,m3c,pad)/m3 (m2,m2c,m3c,pad)/m2 9 perimc (m3,m3c,pad)/m3 ~(m3,m3c,pad)/m3 17 sideoverlap (m3,m3c,pad)/m3 ~(m3,m3c,pad)/m3 nwell,pwell 17 ((ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a,(poly,pc)/a,(m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1,(m2,m2c,m3c,pad)/m2) sideoverlap (m3,m3c,pad)/m3 ~(m3,m3c,pad)/m3 (ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a 17 ((m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1,(m2,m2c,m3c,pad)/m2) sideoverlap (m3,m3c,pad)/m3 ~(m3,m3c,pad)/m3 (poly,pc)/a 17 ((m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1,(m2,m2c,m3c,pad)/m2) sideoverlap (m3,m3c,pad)/m3 ~(m3,m3c,pad)/m3 (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 20 ((m2,m2c,m3c,pad)/m2) sideoverlap (m3,m3c,pad)/m3 ~(m3,m3c,pad)/m3 (m2,m2c,m3c,pad)/m2 25 sidewall (m3,m3c,pad)/m3 ~(m3,m3c,pad)/m3 ~(m3,m3c,pad)/m3 (m3,m3c,pad)/m3 50 fet pfet pdiff,pdc 2 pfet Vdd! nwell 204 450 fet nfet ndiff,ndc 2 nfet Gnd! pwell 150 450 fetresis nfet linear 14100 fetresis pfet linear 48100 fetresis nfet saturation 14100 fetresis pfet saturation 48100 resist (ndiff,nsd,ndc/act,nsc/act) 3800 resist (pdiff,psd,pdc/act,psc/act) 3800 resist (poly,pc/act,pfet,nfet) 5000 resist (metal1,m2c/metal1) 81 resist (metal2,via/m2,pad) 81 resist (metal3,pad/m3,via2/m3) 34 resist nwell 1980000 contact pc 4 15000 contact ndc,pdc,nsc,psc 4 1500 contact m2c 4 500 contact m3c 4 500 planeorder implant 0 planeorder well 1 planeorder active 2 planeorder metal1 3 planeorder metal2 4 planeorder metal3 5 planeorder oxide 6 # 84 "./extract_template/scmosExt.tech.in" 2 # 97 "./extract_template/scmosExt.tech.in" # 1 "./extract_template/scmosExtDiag.tech.in" 1 style check_nwell lambda 100 step 100 resist nwell 2000000 areacap nw,nwc,nsd 100 noplaneordering style check_pwell lambda 100 step 100 resist pwell 2000000 areacap pw,pwc,psd 100 noplaneordering style check_psubstr lambda 50 step 200 areacap psd,psc 1000 noplaneordering style check_nsubstr lambda 50 step 200 areacap nsd,nsc 1000 noplaneordering # 98 "./extract_template/scmosExt.tech.in" 2 # 1830 "scmos.tech.in" 2 # 2635 "scmos.tech.in" end wiring contact pdcontact 4 pdiff 0 metal1 0 contact ndcontact 4 ndiff 0 metal1 0 contact pcontact 4 poly 0 metal1 0 contact ec 6 poly2 0 metal1 0 contact m2contact 4 metal1 0 metal2 0 contact m3contact 5 metal2 0 metal3 0 end router layer1 metal1 3 pdc/m1,ndc/m1,psc/m1,nsc/m1,hpdc/m1,hndc/m1,hpsc/m1,hnsc/m1,pc/m1,ec/m1,capc/m1,clc/m1,emc/m1,pbc/m1,nbdc/m1,m1,m2c/m1,gc 3 layer2 metal2 3 m2,m2c/m2,m3c/m2,pad 4 poly,pc/a,nfet,pfet,wcap,cap,capc/a,nffet,pffet,ndiff,ndc/a,pdiff,pdc/a 1 contacts m2contact 4 gridspacing 8 end plowing fixed nfet,enfet,nffet,pfet,epfet,pffet,glass,pad covered nfet,enfet,nffet,pfet,epfet,pffet drag nfet,enfet,nffet,pfet,epfet,pffet end plot style colorversatec ndiff,ndc yellow 5555 AAAA 5555 AAAA 5555 AAAA 5555 AAAA 5555 AAAA 5555 AAAA 5555 AAAA 5555 AAAA ndiff,ndc cyan 0000 5555 0000 5555 0000 5555 0000 5555 0000 5555 0000 5555 0000 5555 0000 5555 nsd,nsc,col,clc yellow 1515 2A2A 5151 A2A2 1515 2A2A 5151 A2A2 1515 2A2A 5151 A2A2 1515 2A2A 5151 A2A2 nsd,nsc,col,clc cyan 0000 1515 0000 5151 0000 1515 0000 5151 0000 1515 0000 5151 0000 1515 0000 5151 pdiff,pdc yellow 5555 AAAA 5555 AAAA 5555 AAAA 5555 AAAA 5555 AAAA 5555 AAAA 5555 AAAA 5555 AAAA pdiff,pdc cyan 0000 5555 0000 5555 0000 5555 0000 5555 0000 5555 0000 5555 0000 5555 0000 5555 pdiff,pdc magenta AAAA 0000 AAAA 0000 AAAA 0000 AAAA 0000 AAAA 0000 AAAA 0000 AAAA 0000 AAAA 0000 psd,psc yellow 1515 2A2A 5151 A2A2 1515 2A2A 5151 A2A2 1515 2A2A 5151 A2A2 1515 2A2A 5151 A2A2 psd,psc cyan 0000 1515 0000 5151 0000 1515 0000 5151 0000 1515 0000 5151 0000 1515 0000 5151 psd,psc magenta 2A2A 0000 A2A2 0000 2A2A 0000 A2A2 0000 2A2A 0000 A2A2 0000 2A2A 0000 A2A2 0000 poly,pc/a magenta 5555 AAAA 5555 AAAA 5555 AAAA 5555 AAAA 5555 AAAA 5555 AAAA 5555 AAAA 5555 AAAA poly2,ec/a yellow FFFF FFFF FFFF FFFF FFFF FFFF FFFF FFFF FFFF FFFF FFFF FFFF FFFF FFFF FFFF FFFF nfet yellow 0505 8282 1414 0A0A 5050 2828 4141 A0A0 0505 8282 1414 0A0A 5050 2828 4141 A0A0 nfet cyan 0000 0505 0000 1414 0000 5050 0000 4141 0000 0505 0000 1414 0000 5050 0000 4141 nfet magenta 5050 2828 4141 A0A0 0505 8282 1414 0A0A 5050 2828 4141 A0A0 0505 8282 1414 0A0A enfet yellow BABA 7575 EAEA D5D5 ABAB 5757 AEAE 5D5D BABA 7575 EAEA D5D5 ABAB 5757 AEAE 5D5D enfet cyan 4141 0A0A 0505 2828 1414 A0A0 5050 8282 4141 0A0A 0505 2828 1414 A0A0 5050 8282 nffet yellow 8E8E 0707 8B8B D5D5 E8E8 7070 B8B8 5D5D 8E8E 0707 8B8B D5D5 E8E8 7070 B8B8 5D5D nffet cyan 0101 0808 1414 2828 1010 8080 4141 8282 0101 0808 1414 2828 1010 8080 4141 8282 nffet magenta 5050 A0A0 4040 0202 0505 0A0A 0404 2020 5050 A0A0 4040 0202 0505 0A0A 0404 2020 pfet yellow 6363 A0A0 5050 2828 3636 0A0A 0505 8282 6363 A0A0 5050 2828 3636 0A0A 0505 8282 pfet cyan 0000 5151 0000 5454 0000 1515 0000 1515 0000 5151 0000 5454 0000 1515 0000 1515 pfet magenta 9494 0A0A 2525 8282 4949 A0A0 5252 2828 9494 0A0A 2525 8282 4949 A0A0 5252 2828 epfet yellow BCBC 4F4F 2F2F D3D3 CBCB F4F4 F2F2 3D3D BCBC 4F4F 2F2F D3D3 CBCB F4F4 F2F2 3D3D epfet cyan 0000 A0A0 0000 2828 0000 0A0A 0000 8282 0000 A0A0 0000 2828 0000 0A0A 0000 8282 epfet magenta 4141 0000 5050 0000 1414 0000 0505 0000 4141 0000 5050 0000 1414 0000 0505 0000 pffet yellow 7B7B F0F0 F0F0 E9E9 B7B7 0F0F 0F0F 9E9E 7B7B F0F0 F0F0 E9E9 B7B7 0F0F 0F0F 9E9E pffet cyan 0000 0101 0000 1414 0000 1010 0000 4141 0000 0101 0000 1414 0000 1010 0000 4141 pffet magenta 8484 0A0A 2525 8282 4848 A0A0 5252 2828 8484 0A0A 2525 8282 4848 A0A0 5252 2828 cap,cc/a yellow 3E3E 7777 E3E3 C1C1 E3E3 7777 3E3E 1C1C 3E3E 7777 E3E3 C1C1 E3E3 7777 3E3E 1C1C cap,cc/a magenta 4141 8888 1414 2A2A 1414 8888 4141 A2A2 4141 8888 1414 2A2A 1414 8888 4141 A2A2 pdc/m1,ndc/m1,psc/m1,nsc/m1,hpdc/m1,hndc/m1,hpsc/m1,hnsc/m1,pc/m1,ec/m1,capc/m1,clc/m1,emc/m1,pbc/m1,nbdc/m1,m1,m2c/m1,gc cyan AAAA 0000 AAAA 0000 AAAA 0000 AAAA 0000 AAAA 0000 AAAA 0000 AAAA 0000 AAAA 0000 m2,m2c/m2,m3c/m2,pad cyan 0000 1111 0000 4444 0000 1111 0000 4444 0000 1111 0000 4444 0000 1111 0000 4444 m2,m2c/m2,m3c/m2,pad magenta 0000 4444 0000 1111 0000 4444 0000 1111 0000 4444 0000 1111 0000 4444 0000 1111 m2c/m1 black 0000 6666 6666 0000 0000 9999 9999 0000 0000 6666 6666 0000 0000 9999 9999 0000 pad,glass black 0300 0700 0E00 1C00 3800 7000 E000 C000 00C0 00E0 0070 0038 001C 000E 0007 0003 nwell yellow 0800 1000 2000 4000 8000 0001 0002 0004 0008 0010 0020 0040 0080 0010 0200 0400 nwell cyan 1000 2000 4000 8000 0001 0002 0004 0008 0010 0020 0040 0080 0100 0200 0400 0800 pwell yellow 1000 0400 0400 0100 0100 0040 0040 0010 0010 0004 0004 0001 0001 4000 4000 1000 pwell cyan 0000 0800 0000 0200 0000 0080 0000 0020 0000 0008 0000 0002 0000 8000 0000 2000 pwell magenta 0800 0000 0200 0000 0080 0000 0020 0000 0008 0000 0002 0000 8000 0000 2000 0000 bd yellow 4444 8888 4444 8888 4444 8888 4444 8888 4444 8888 4444 8888 4444 8888 4444 8888 bd cyan 0000 4444 0000 4444 0000 4444 0000 4444 0000 4444 0000 4444 0000 4444 0000 4444 bd magenta 8888 0000 8888 0000 8888 0000 8888 0000 8888 0000 8888 0000 8888 0000 8888 0000 nbd,nbdc yellow 5555 AAAA 5555 AAAA 5555 AAAA 5555 AAAA 5555 AAAA 5555 AAAA 5555 AAAA 5555 AAAA nbd,nbdc cyan 0000 5555 0000 5555 0000 5555 0000 5555 0000 5555 0000 5555 0000 5555 0000 5555 nbd,nbdc magenta 8888 0000 8888 0000 8888 0000 8888 0000 8888 0000 8888 0000 8888 0000 8888 0000 em,emc yellow 4444 8888 4444 8888 4444 8888 4444 8888 4444 8888 4444 8888 4444 8888 4444 8888 em,emc cyan 0000 4444 0000 4444 0000 4444 0000 4444 0000 4444 0000 4444 0000 4444 0000 4444 pbase,pbc yellow 5555 AAAA 0000 0000 5555 AAAA 0000 0000 5555 AAAA 0000 0000 5555 AAAA 0000 0000 pbase,pbc cyan 0000 5555 0000 0000 0000 5555 0000 0000 0000 5555 0000 0000 0000 5555 0000 0000 pbase,pbc magenta AAAA 0000 0000 0000 AAAA 0000 0000 0000 AAAA 0000 0000 0000 AAAA 0000 0000 0000 m3,m3c/m3 black 0100 0000 0000 0000 1010 0000 0000 0000 0001 0000 0000 0000 1010 0000 0000 0000 m3,m3c/m3 cyan 0280 0000 0820 0000 2008 0000 8002 0000 8002 0000 2008 0000 0820 0000 0280 0000 m3,m3c/m3 magenta 0100 06C0 0440 1830 1010 600C 4004 8003 0001 C006 4004 3018 1010 0C60 0440 0380 m3c/m2 black 0820 0820 0820 0FE0 E00F 2008 2008 2008 2008 2008 2008 E00F 0000 0FE0 0820 0820 error_p,error_s,error_ps black 0000 3C3C 4646 4A4A 5252 6262 3C3C 0000 0000 3C3C 4646 4A4A 5252 6262 3C3C 0000 magnet yellow AAAA 0000 5555 0000 AAAA 0000 5555 0000 AAAA 0000 5555 0000 AAAA 0000 5555 0000 fence magenta FFFF 0000 0000 0000 0000 0000 0000 0000 FFFF 0000 0000 0000 0000 0000 0000 0000 rotate cyan 0000 E0E0 E0E0 E0E0 0000 0000 0000 0000 0000 E0E0 E0E0 E0E0 0000 0000 0000 0000 pdc,ndc,psc,nsc,hpdc,hndc,hpsc,hnsc,pc,ec,capc,nbdc,clc,emc,pbc X style versatec pfet 07c0 0f80 1f00 3e00 7c00 f800 f001 e003 c007 800f 001f 003e 00c7 00f8 01f0 03e0 nfet 1f00 0f80 07c0 03e0 01f0 00f8 007c 003e 001f 800f c007 e003 f001 f800 7c00 3e00 m2c c3c3 c3c3 0000 0000 0000 0000 c3c3 c3c3 c3c3 c3c3 0000 0000 0000 0000 c3c3 c3c3 pwell 2020 2020 2020 2020 2020 2020 2020 2020 0000 0000 0000 0000 0000 0000 0000 0000 nwell 0808 0404 0202 0101 0000 0000 0000 0000 0808 0404 0202 0101 0000 0000 0000 0000 poly,pc/a,nfet,pfet,wcap,cap,capc/a,nffet,pffet 0808 0400 0202 0101 8080 4000 2020 1010 0808 0004 0202 0101 8080 0040 2020 1010 pdc/m1,ndc/m1,psc/m1,nsc/m1,hpdc/m1,hndc/m1,hpsc/m1,hnsc/m1,pc/m1,ec/m1,capc/m1,clc/m1,emc/m1,pbc/m1,nbdc/m1,m1,m2c/m1,gc 8080 0000 0000 0000 0808 0000 0000 0000 8080 0000 0000 0000 0808 0000 0000 0000 pad,glass 0000 0000 1c1c 3e3e 3636 3e3e 1c1c 0000 0000 0000 1c1c 3e3e 3636 3e3e 1c1c 0000 nsd,nsc,col,clc 0808 1414 2222 4141 8080 4040 2020 1010 0808 1414 2222 4141 8080 4040 2020 1010 m2,m2c/m2,m3c/m2,pad 0000 1111 0000 0000 0000 1111 0000 0000 0000 1111 0000 0000 0000 1111 0000 0000 pdiff,pdc,pfet 0000 0808 5555 8080 0000 8080 5555 0808 0000 0808 5555 8080 0000 8080 5555 0808 psd,psc 1414 2222 0000 2222 4141 2222 0000 2222 1414 2222 0000 2222 4141 2222 0000 2222 ndiff,nfet,ndc 0808 1010 2020 4040 8080 4141 2222 1414 0808 1010 2020 4040 8080 4141 2222 1414 poly2,ec/a,enfet,epfet,cap,capc/a,nffet,pffet,hnfet,hpfet 0000 2020 5050 2020 0000 0202 0505 0202 0000 2020 5050 2020 0000 0202 0505 0202 pdc,ndc,psc,nsc,hpdc,hndc,hpsc,hnsc,pc,ec,capc,nbdc,clc,emc,pbc X style gremlin pfet 9 nfet 10 m2c 11 pwell 15 nwell 16 poly,pc/a,nfet,pfet,wcap,cap,capc/a,nffet,pffet 19 pdc/m1,ndc/m1,psc/m1,nsc/m1,hpdc/m1,hndc/m1,hpsc/m1,hnsc/m1,pc/m1,ec/m1,capc/m1,clc/m1,emc/m1,pbc/m1,nbdc/m1,m1,m2c/m1,gc 22 pad,glass 23 nsd,nsc 24 m2,m2c/m2,m3c/m2,pad 28 pdiff,pdc,pfet 29 psd,psc 30 ndiff,nfet,ndc 31 m2c/m1,pc/m1,ndc/m1,pdc/m1,psc/m1,nsc/m1,pad/m1 X style postscript 1 C0C0C0C0 C0C0C0C0 00000000 00000000 0C0C0C0C 0C0C0C0C 00000000 00000000 2 A0A0A0A0 0A0A0A0A A0A0A0A0 0A0A0A0A A0A0A0A0 0A0A0A0A A0A0A0A0 0A0A0A0A 3 00030003 000C000C 00300030 00C000C0 03000300 0C000C00 30003000 C000C000 4 00000000 00000000 C0C0C0C0 00000000 00000000 00000000 0C0C0C0C 00000000 5 FFFFFFFF FFFFFFFF FFFFFFFF FFFFFFFF FFFFFFFF FFFFFFFF FFFFFFFF FFFFFFFF 6 07070707 0E0E0E0E 1C1C1C1C 38383838 70707070 E0E0E0E0 C1C1C1C1 83838383 7 18181818 30303030 60606060 C0C0C0C0 81818181 03030303 06060606 0C0C0C0C 8 18181818 0C0C0C0C 06060606 03030303 81818181 C0C0C0C0 60606060 30303030 9 18181818 3C3C3C3C 3C3C3C3C 18181818 81818181 C3C3C3C3 C3C3C3C3 81818181 10 F0F0F0F0 60606060 06060606 0F0F0F0F 0F0F0F0F 06060606 60606060 F0F0F0F0 11 01000080 02000040 0C000030 F000000F 000FF000 00300C00 00400200 00800100 12 00000000 00000000 00000000 00000000 00000000 00000000 00000000 00000000 13 00000000 00000000 33333333 33333333 00000000 00000000 CCCCCCCC CCCCCCCC 1 47 95 111 0 2 223 31 223 0 3 0 0 0 192 4 31 111 31 0 5 31 111 255 0 6 63 95 191 0 7 255 63 255 0 8 0 0 0 127 9 223 47 223 0 10 0 255 255 0 11 0 0 255 0 12 191 127 0 0 13 95 223 63 0 14 0 0 0 255 15 191 127 63 0 16 111 151 244 0 17 23 175 183 0 cc,pc,ndc,pdc,psc,nsc 14 X m2c,pad,glass 14 B pad,glass 14 11 m2c 14 13 m2,m2c,pad 13 10 pdc,ndc,psc,nsc,hpdc,hndc,hpsc,hnsc,pc,ec,capc,clc,emc,pbc,nbdc,m1,m2c,gc 12 9 cap,cc,poly2 11 7 nsd,nsc 7 1 psd,psc 6 1 nfet,nffet 9 8 pfet,wcap,pffet 1 7 poly,pc,cap,cc 10 5 nfet 16 5 pfet,wcap 17 5 pdiff,pdc,pffet 1 5 ndiff,ndc,nffet 9 5 pwell 1 4 nwell 2 4 style pnm draw metal1 draw metal2 draw polysilicon draw ndiffusion draw pdiffusion draw ntransistor draw ptransistor map psubstratepdiff pdiffusion map nsubstratendiff ndiffusion map polycontact polysilicon metal1 map m2contact metal1 metal2 map m3contact metal2 metal3 map ndcontact ndiffusion metal1 map pdcontact pdiffusion metal1 map nsubstratencontact ndiffusion metal1 map psubstratepcontact pdiffusion metal1 end